USD818961SActiveUtility

Insulation unit cover of semiconductor manufacturing apparatus

53
Assignee: HITACHI INT ELECTRIC INCPriority: Feb 10, 2016Filed: Jul 28, 2016Granted: May 29, 2018
Est. expiryFeb 10, 2036(~9.5 yrs left)· nominal 20-yr term from priority
Inventors:Takatomo Yamaguchi
53
PatentIndex Score
6
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for an insulation unit cover of semiconductor manufacturing apparatus, as shown and described.

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