USD822081SActiveUtility

Rotary tool for boat of semiconductor manufacturing apparatus

Assignee: HITACHI INT ELECTRIC INCPriority: Feb 10, 2016Filed: Jul 28, 2016Granted: Jul 3, 2018

Est. expiryFeb 10, 2036(~9.6 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described).

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