USD825504SActiveUtility

Target profile for a physical vapor deposition chamber target

91
Assignee: APPLIED MATERIALS INCPriority: Apr 21, 2015Filed: Jul 10, 2017Granted: Aug 14, 2018
Est. expiryApr 21, 2035(~8.8 yrs left)· nominal 20-yr term from priority
Inventors:Fuhong ZhangWilliam JohansonYu LiuAdolph Miller AllenBrij DattaKeith A. Miller
91
PatentIndex Score
34
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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