USD834075SActiveUtility

Pressing member for substrate polishing apparatus

65
Assignee: EBARA CORPPriority: Aug 5, 2016Filed: Feb 3, 2017Granted: Nov 20, 2018
Est. expiryAug 5, 2036(~10.1 yrs left)· nominal 20-yr term from priority
Inventors:Kenji KamimuraMasayuki NakanishiSatoru YamamotoYasuyuki MiyasawaKenji Kodera
65
PatentIndex Score
7
Cited by
31
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.