USD837755SActiveUtility

Target profile for a physical vapor deposition chamber target

Assignee: APPLIED MATERIALS INCPriority: Apr 16, 2015Filed: Sep 21, 2017Granted: Jan 8, 2019
Est. expiryApr 16, 2035(~8.7 yrs left)· nominal 20-yr term from priority
89
PatentIndex Score
30
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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