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Pressing member for substrate polishing apparatus

63
Assignee: EBARA CORPPriority: Aug 5, 2016Filed: Aug 14, 2018Granted: Jun 11, 2019
Est. expiryAug 5, 2036(~10.1 yrs left)· nominal 20-yr term from priority
Inventors:Kenji KamimuraMasayuki NakanishiSatoru YamamotoYasuyuki MiyasawaKenji Kodera
63
PatentIndex Score
6
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32
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.

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