USD858468SActiveUtility

Collimator for a physical vapor deposition chamber

Assignee: APPLIED MATERIALS INCPriority: Mar 16, 2018Filed: Mar 16, 2018Granted: Sep 3, 2019
Est. expiryMar 16, 2038(~11.7 yrs left)· nominal 20-yr term from priority
73
PatentIndex Score
14
Cited by
49
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.

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