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Chemical vapor deposition wafer carrier with thermal cover

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Assignee: VEECO INSTR INCPriority: Mar 26, 2018Filed: Mar 26, 2018Granted: Oct 15, 2019
Est. expiryMar 26, 2038(~11.7 yrs left)· nominal 20-yr term from priority
Inventors:Sandeep KrishnanYuliy RashkovskyAlexander I. GuraryLeo ChinMandar Deshpande
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Claims

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CLAIM 
     
       The ornamental design for a chemical vapor deposition wafer carrier with thermal cover, as shown and described.

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