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Target profile for a physical vapor deposition chamber target

89
Assignee: APPLIED MATERIALS INCPriority: Dec 11, 2017Filed: Dec 11, 2017Granted: Nov 26, 2019
Est. expiryDec 11, 2037(~11.4 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerFuhong ZhangZheng Wang
89
PatentIndex Score
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CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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