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Gas supply nozzle for substrate processing apparatus

65
Assignee: KOKUSAI ELECTRIC CORPPriority: Jul 19, 2018Filed: Dec 7, 2018Granted: Jul 21, 2020
Est. expiryJul 19, 2038(~12 yrs left)· nominal 20-yr term from priority
Inventors:Koji SaikiMakoto Tsuri
65
PatentIndex Score
10
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a gas supply nozzle for substrate processing apparatus, as shown and described.

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