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Gas inlet attachment for wafer processing apparatus

68
Assignee: KOKUSAI ELECTRIC CORPPriority: Jan 28, 2019Filed: Jul 26, 2019Granted: Nov 10, 2020
Est. expiryJan 28, 2039(~12.5 yrs left)· nominal 20-yr term from priority
Inventors:Satoru MurataShinya Morita
68
PatentIndex Score
10
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17
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.

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