USD913229SActiveUtility

Heater for heating semiconductor wafer

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Assignee: TOKYO ELECTRON LTDPriority: Apr 24, 2019Filed: Oct 15, 2019Granted: Mar 16, 2021
Est. expiryApr 24, 2039(~12.8 yrs left)· nominal 20-yr term from priority
Inventors:Toshiki Kobayashi
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PatentIndex Score
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Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a heater for heating semiconductor wafer, as shown and described.

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