USD924823SActiveUtility

Adiabatic plate for substrate processing apparatus

Assignee: KOKUSAI ELECTRIC CORPPriority: Jul 19, 2018Filed: Dec 4, 2018Granted: Jul 13, 2021

Est. expiryJul 19, 2038(~12 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       We claim the ornamental design for an adiabatic plate for substrate processing apparatus, as shown and described.

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