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Boat for substrate processing apparatus

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Assignee: KOKUSAI ELECTRIC CORPPriority: Nov 19, 2018Filed: May 17, 2019Granted: Jan 11, 2022
Est. expiryNov 19, 2038(~12.4 yrs left)· nominal 20-yr term from priority
Inventors:Makoto SambuMakoto TsuriSatoshi Fujii
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PatentIndex Score
7
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a boat for substrate processing apparatus, as shown and described.

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