USD946638SActiveUtility
Target profile for a physical vapor deposition chamber target
Est. expiryDec 11, 2037(~11.4 yrs left)· nominal 20-yr term from priority
86
PatentIndex Score
20
Cited by
134
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.Join the waitlist — get patent alerts
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