USD946638SActiveUtility

Target profile for a physical vapor deposition chamber target

Assignee: APPLIED MATERIALS INCPriority: Dec 11, 2017Filed: Nov 25, 2019Granted: Mar 22, 2022
Est. expiryDec 11, 2037(~11.4 yrs left)· nominal 20-yr term from priority
86
PatentIndex Score
20
Cited by
134
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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