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Higher temperature vented susceptor

86
Assignee: ASM IP HOLDING BVPriority: Jan 17, 2019Filed: May 4, 2021Granted: Jul 26, 2022
Est. expiryJan 17, 2039(~12.5 yrs left)· nominal 20-yr term from priority
Inventors:Uday Kiran RokkamSam KimSaket RathiDakai Bian
86
PatentIndex Score
11
Cited by
159
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a higher temperature vented susceptor, as shown and described.

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