Inventor · disambiguated record
Sam Kim
Also filed as: KIM SAM · KIM SAM H · KIM SAM HYUNGSAM
31 granted patents·9 pending applications·495 citations·filing 1988–2025
96Inventor score
Top patents by PatentIndex Score
40 records- 0196USD914620SVented susceptorASM IP HOLDING BV·Filed 2019·Granted Mar 30, 2021·325 cites·1 claims
- 0295US11837494B2Substrate handling device with adjustable jointsASM IP HOLDING BV·Filed 2022·Granted Dec 5, 2023·4 cites·13 claims
- 0394US11488854B2Substrate handling device with adjustable jointsASM IP HOLDING BV·Filed 2021·Granted Nov 1, 2022·4 cites·10 claims
- 0488US10233543B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2015·Granted Mar 19, 2019·4 cites·16 claims
- 0587US11842908B2Semiconductor processing chamber with filament lamps having nonuniform heat outputASM IP HOLDING BV·Filed 2021·Granted Dec 12, 2023·2 cites·19 claims
- 0687US9039864B2Off-center ground return for RF-powered showerheadBAEK JONGHOON·Filed 2010·Granted May 26, 2015·9 cites·7 claims
- 0786US11961756B2Vented susceptorASM IP HOLDING BV·Filed 2020·Granted Apr 16, 2024·2 cites·14 claims
- 0886US11828707B2Method and apparatus for transmittance measurements of large articlesASM IP HOLDING BV·Filed 2021·Granted Nov 28, 2023·2 cites·9 claims
- 0986USD958764SHigher temperature vented susceptorASM IP HOLDING BV·Filed 2021·Granted Jul 26, 2022·11 cites·1 claims
- 1086US9966274B2Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same methodSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 8, 2018·4 cites·19 claims
- 1183US11293099B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·1 cites·13 claims
- 1281US6825447B2Apparatus and method for uniform substrate heating and contaminate collectionAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·32 cites·24 claims
- 1381US5007145AEnd-locking device for slide fastenersKIM SAM H·Filed 1989·Granted Apr 16, 1991·40 cites·18 claims
- 1481US2025292995A1Susceptor assembly for plasma apparatusASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1578USD920936SHigher temperature vented susceptorASM IP HOLDING BV·Filed 2019·Granted Jun 1, 2021·15 cites·1 claims
- 1677US10669629B2Showerhead assembly with multiple fluid delivery zonesAPPLIED MATERIALS INC·Filed 2018·Granted Jun 2, 2020·0 cites·20 claims
- 1776US8875657B2Balancing RF bridge assemblyBAEK JONGHOON·Filed 2011·Granted Nov 4, 2014·1 cites·17 claims
- 1874US12209663B2Sealing member with lip sealAPPLIED MATERIALS INC·Filed 2023·Granted Jan 28, 2025·0 cites·16 claims
- 1974US7845618B2Valve door with ball couplingAPPLIED MATERIALS INC·Filed 2007·Granted Dec 7, 2010·7 cites·13 claims
- 2072US12270106B2Substrate retaining apparatus, system including the apparatus, and method of using sameASM IP HOLDING BV·Filed 2024·Granted Apr 8, 2025·0 cites·20 claims
- 2172US8853098B2Substrate support with gas introduction openingsKIM SAM H·Filed 2012·Granted Oct 7, 2014·2 cites·19 claims
- 2272US2024249970A1Vented susceptorASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2371US2024218508A1Runout and wobble measurement fixturesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2469US12347644B2Susceptor assembly for plasma apparatusASM IP HOLDING BV·Filed 2021·Granted Jul 1, 2025·0 cites·8 claims
- 2569US11946137B2Runout and wobble measurement fixturesASM IP HOLDING BV·Filed 2021·Granted Apr 2, 2024·0 cites·18 claims
- 2669US7007919B2Slit valve method and apparatusAPPLIED MATERIALS INC·Filed 2003·Granted Mar 7, 2006·13 cites·14 claims
- 2767US2024055279A1Semiconductor processing chamber with filament lamps having nonuniform heat outputASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2860US9685346B2Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same methodKIM GON-JUN·Filed 2015·Granted Jun 20, 2017·1 cites·17 claims
- 2959USD947913SSusceptor shaftASM IP HOLDING BV·Filed 2019·Granted Apr 5, 2022·7 cites·1 claims
- 3054US11885023B2Substrate retaining apparatus, system including the apparatus, and method of using sameASM IP HOLDING BV·Filed 2019·Granted Jan 30, 2024·0 cites·20 claims
- 3152USD965044SSusceptor shaftASM IP HOLDING BV·Filed 2019·Granted Sep 27, 2022·5 cites·1 claims
- 3250US8430961B2Source gas flow path control in PECVD system to control a by-product film deposition on inside chamberPARK BEOM SOO·Filed 2008·Granted Apr 30, 2013·0 cites·20 claims
- 3346US2010184290A1Substrate support with gas introduction openingsAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3442US2009083953A1Clamp mechanism for a backing plate disposed in a pecvd chamberKIM SAM H·Filed 2008·Application pending·0 cites
- 3541US2012009347A1Precise temperature control for teos application by heat transfer fluidLEE DONGSUH·Filed 2010·Application pending·0 cites
- 3639USD965524SSusceptor supportASM IP HOLDING BV·Filed 2019·Granted Oct 4, 2022·2 cites·1 claims
- 3739US2013071581A1Plasma monitoring and minimizing stray capacitanceBAEK JONGHOON·Filed 2012·Application pending·0 cites
- 3838US2017353994A1Self-centering pedestal heaterAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 3935USD975665SSusceptor shaftASM IP HOLDING BV·Filed 2019·Granted Jan 17, 2023·1 cites·1 claims
- 4028US4958481ABox-cording apparatusKIM SAM H·Filed 1988·Granted Sep 25, 1990·1 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →