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Susceptor shaft

52
Assignee: ASM IP HOLDING BVPriority: Aug 19, 2019Filed: Aug 19, 2019Granted: Sep 27, 2022
Est. expiryAug 19, 2039(~13.1 yrs left)· nominal 20-yr term from priority
52
PatentIndex Score
5
Cited by
8,390
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a susceptor shaft, as shown and described.

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