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Susceptor shaft

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Assignee: ASM IP HOLDING BVPriority: May 17, 2019Filed: Sep 4, 2019Granted: Jan 17, 2023
Est. expiryMay 17, 2039(~12.8 yrs left)· nominal 20-yr term from priority
Inventors:Aniket PatilSam Kim
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PatentIndex Score
1
Cited by
8,386
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a susceptor shaft, as shown and described.

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