Clamp mechanism for a backing plate disposed in a pecvd chamber

Abstract

Embodiments described herein relate to a clamp mechanism for a backing plate disposed in a PECVD chamber, comprising an upper clamp portion fixed to an interior portion of a chamber lid, and a lower clamp portion in sliding contact with the upper clamp portion and the backing plate, wherein the lower clamp portion comprises at least one fastener disposed through the lower clamp portion and the chamber lid, the at least one fastener comprising an adjustment member, and wherein rotation of the adjustment member causes lateral movement and compression to the backing plate.

1 . A clamp mechanism for a backing plate disposed in a plasma chamber, comprising:
 a first clamp portion fixed to an interior portion of a chamber lid assembly, the first clamp portion having at least one first slanted contact surface; and   a second clamp portion having at least one second slanted contact surface in sliding contact with the first slanted contact surface and the backing plate, the second clamp portion comprising:
 at least one fastener disposed through the second clamp portion and the interior portion of the chamber lid assembly, the at least one fastener comprising an adjustment member exposed to an exterior of the plasma chamber and providing lateral movement of the second clamp portion relative to the backing plate and the first clamp portion by rotation of the adjustment member. 
   
   
   
       2 . The clamp mechanism of  claim 1 , wherein the first clamp portion and the second clamp portion are made of a polyetheretherketone (PEEK) material. 
   
   
       3 . The clamp mechanism of  claim 1 , wherein the first clamp portion is fixed to the interior portion of the chamber lid assembly by a screw. 
   
   
       4 . The clamp mechanism of  claim 1 , wherein the at least one fastener is a bolt. 
   
   
       5 . The clamp mechanism of  claim 4 , wherein the bolt is an Allen head bolt. 
   
   
       6 . The clamp mechanism of  claim 4 , wherein the bolt is a hex head bolt. 
   
   
       7 . The clamp mechanism of  claim 4 , wherein the bolt includes a rotation prevention feature. 
   
   
       8 . The clamp mechanism of  claim 1 , wherein the adjustment member is a nut. 
   
   
       9 . The clamp mechanism of  claim 8 , wherein the nut is made of stainless steel and includes an anti-bind or anti-gall coating. 
   
   
       10 . The clamp mechanism of  claim 9 , wherein the coating is made of tungsten disulfide or dicronite. 
   
   
       11 . A plasma chamber having a lid assembly including a backing plate, a cover spaced-apart from the backing plate by a wall, and a plurality of clamp mechanisms disposed in the area between the lid and the backing plate, each of the plurality of clamp mechanisms comprising:
 a first clamp portion fixed to an interior portion of the wall, the first clamp portion having at least one first slanted contact surface; and   a second clamp portion having at least one second slanted contact surface in sliding contact with the first slanted contact surface and the backing plate, the second clamp portion comprising:
 at least one fastener disposed through the second clamp portion and the wall, the at least one fastener comprising an adjustment member exposed to an exterior of the plasma chamber and providing lateral movement of the second clamp portion relative to the backing plate and the first clamp portion by rotation of the adjustment member. 
   
   
   
       12 . The clamp mechanism of  claim 11 , wherein the first clamp portion is fixed to the wall by a screw. 
   
   
       13 . The clamp mechanism of  claim 11 , wherein the at least one fastener is a bolt. 
   
   
       14 . The clamp mechanism of  claim 13 , wherein the bolt is an Allen head bolt. 
   
   
       15 . The clamp mechanism of  claim 13 , wherein the bolt is a hex head bolt. 
   
   
       16 . The clamp mechanism of  claim 13 , wherein the bolt includes a rotation prevention feature. 
   
   
       17 . The clamp mechanism of  claim 11 , wherein the adjustment member is a nut. 
   
   
       18 . The clamp mechanism of  claim 17 , wherein the nut is made of stainless steel and includes an anti-bind or anti-gall coating. 
   
   
       19 . The clamp mechanism of  claim 18 , wherein the coating is made of tungsten disulfide or dicronite. 
   
   
       20 . A plasma chamber having a lid assembly including a backing plate, a cover spaced-apart from the backing plate by a wall, and a plurality of clamp mechanisms disposed in the area between the lid and the backing plate, each of the plurality of clamp mechanisms comprising:
 a first clamp portion fixed to an interior portion of the wall by a screw, the first clamp portion having at least one first slanted contact surface; and   a second clamp portion having at least one second slanted contact surface in sliding contact with the first slanted contact surface and the backing plate, the second clamp portion comprising:
 at least one fastener disposed through the second clamp portion and the wall, the at least one fastener comprising a nut exposed to an exterior of the plasma chamber and providing lateral movement of the second clamp portion relative to the backing plate and the first clamp portion by rotation of the nut. 
   
   
   
       21 . The clamp mechanism of  claim 20 , wherein the at least one fastener is a bolt. 
   
   
       22 . The clamp mechanism of  claim 21 , wherein the bolt is an Allen head bolt. 
   
   
       23 . The clamp mechanism of  claim 21 , wherein the bolt is a hex head bolt. 
   
   
       24 . The clamp mechanism of  claim 21 , wherein the bolt includes a rotation prevention feature. 
   
   
       25 . The clamp mechanism of  claim 20 , wherein the nut is made of stainless steel and includes an anti-bind or anti-gall coating. 
   
   
       26 . The clamp mechanism of  claim 25 , wherein the coating is made of tungsten disulfide or dicronite.