USD964443SActiveUtility

Gas inlet attachment for wafer processing apparatus

70
Assignee: KOKUSAI ELECTRIC CORPPriority: Aug 18, 2020Filed: Feb 17, 2021Granted: Sep 20, 2022
Est. expiryAug 18, 2040(~14 yrs left)· nominal 20-yr term from priority
Inventors:Satoru Murata
70
PatentIndex Score
4
Cited by
16
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.

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