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Gas supply nozzle for substrate processing apparatus

76
Assignee: KOKUSAI ELECTRIC CORPPriority: Jul 27, 2020Filed: Jan 25, 2021Granted: Oct 4, 2022
Est. expiryJul 27, 2040(~14 yrs left)· nominal 20-yr term from priority
Inventors:Makoto SambuSatoshi Fujii
76
PatentIndex Score
6
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20
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas supply nozzle for substrate processing apparatus, as shown and described.

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