USD973116SActiveUtility
Mainframe of substrate processing system
Est. expiryNov 17, 2040(~14.3 yrs left)· nominal 20-yr term from priority
79
PatentIndex Score
7
Cited by
29
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
The ornamental design for a mainframe for a substrate processing system, as shown and described.Join the waitlist — get patent alerts
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