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Mainframe of substrate processing system

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Assignee: APPLIED MATERIALS INCPriority: Nov 17, 2020Filed: Nov 17, 2020Granted: Dec 27, 2022
Est. expiryNov 17, 2040(~14.3 yrs left)· nominal 20-yr term from priority
Inventors:Michael R. RiceMichael KucharTravis MoreyAdam J. WyattOfer Amir
79
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7
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a mainframe for a substrate processing system, as shown and described.

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