USD989144SActiveUtility

Apparatus for evaluating semiconductor substrate

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Assignee: HITACHI HIGH TECH CORPPriority: May 14, 2021Filed: Oct 13, 2021Granted: Jun 13, 2023
Est. expiryMay 14, 2041(~14.8 yrs left)· nominal 20-yr term from priority
Inventors:Masayuki ArakawaJunpei HokariAkira KojimaMasaki MizuochiTomokazu KobayashiTakaaki Kikuchi
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PatentIndex Score
1
Cited by
28
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an apparatus for evaluating semiconductor substrate, as shown and described.

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