USD989831SActiveUtility

Apparatus for evaluating semiconductor substrate

58
Assignee: HITACHI HIGH TECH CORPPriority: May 14, 2021Filed: Oct 13, 2021Granted: Jun 20, 2023
Est. expiryMay 14, 2041(~14.8 yrs left)· nominal 20-yr term from priority
Inventors:Masayuki ArakawaJunpei HokariAkira KojimaMasaki MizuochiTomokazu KobayashiTakaaki Kikuchi
58
PatentIndex Score
2
Cited by
28
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an apparatus for evaluating semiconductor substrate, as shown and described.

Join the waitlist — get patent alerts

Track USD989831S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.