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Gas flow control plate

87
Assignee: ASM IP HOLDING BVPriority: Sep 7, 2021Filed: Sep 7, 2021Granted: Jun 27, 2023
Est. expirySep 7, 2041(~15.1 yrs left)· nominal 20-yr term from priority
87
PatentIndex Score
12
Cited by
8,390
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design of a gas flow control plate, as shown and described.

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