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Collimator for use in a physical vapor deposition (PVD) chamber

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Assignee: APPLIED MATERIALS INCPriority: Dec 15, 2021Filed: Apr 4, 2022Granted: Aug 29, 2023
Est. expiryDec 15, 2041(~15.4 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerFuhong ZhangLanlan ZhongKishor Kalathiparambil
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a collimator for use in a physical vapor deposition (PVD) chamber, as shown and described.

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