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Collimator for use in a physical vapor deposition (PVD) chamber

82
Assignee: APPLIED MATERIALS INCPriority: Apr 7, 2020Filed: Apr 7, 2020Granted: Sep 12, 2023
Est. expiryApr 7, 2040(~13.7 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerFuhong ZhangLanlan ZhongKishor Kalathiparambil
82
PatentIndex Score
10
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a collimator for use in a physical vapor deposition (PVD) chamber, as shown and described.

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