USRE34489EExpiredUtility

Atomic force microscope with optional replaceable fluid cell

98
Assignee: UNIV CALIFORNIAPriority: Mar 13, 1989Filed: Jun 4, 1992Granted: Dec 28, 1993
Est. expiryMar 13, 2009(expired)· nominal 20-yr term from priority
B82Y 35/00G01Q 60/38G01Q 70/02Y10S977/87G01Q 70/04G01Q 30/025Y10S977/863G01Q 30/14
98
PatentIndex Score
153
Cited by
13
References
58
Claims

Abstract

An atomic force microscope which is readily useable for researchers for its intended use without extensive lost time for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe is carried by a replaceable probe-carrying module which is factory set up and merely inserted and fine tuned by the user. The probe-carrying module also includes the provision for forming a fluid cell around the probe. Fluid can be inserted into and/or be circulated through the fluid cell through incorporated tubes in the porbe-carrying module. Electrodes are also provided in the fluid cell for various uses including real-time studies of electro-chemical operations taking place in the fluid cell. The piezoelectric scan tube employed includes a voltage shield to prevent scanning voltages to the tube from affecting data readings. Samples are easily mounted, replaced, and horizontally adjusted using a sample stage which is magnetically attached to the top of the scan tube. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent.

Claims

exact text as granted — not AI-modified
Wherefore, having thus described our invention, what is claimed is: 
     
       1. An atomic force microscope which is quickly and easily set up and in which the probe thereof is easily replaceable and resists breakage during setup comprising: (a) a horizontal base member;   (b) a scan tube vertically supported at a bottom end by said base member and having a top surface for holding a sample to be scanned and moveable in x-, y-, and z-directions as a result of scanning voltages applied thereto;   (c) first support means extending upward from said base member;   (d) a sample holding block having a chamber therein, said sample holding block having a first bore communicating with said chamber through a bottom surface, a second bore communicating with said chamber through a top surface, and a third bore communicating with said chamber at an acute angle to said second bore, said sample holding block being positioned with said scan tube passing through said first bore and supported by said first support means;   (e) second support means extending upward from said bottom surface into said chamber;   (f) a probe-carrying module having top and bottom surfaces removably disposed in said chamber and supported by said second support means, said bottom surface having a probe attached thereto and extending downward therefrom at an acute angle with respect to said bottom surface of said probe-carrying module and with a tip of said probe positioned to contact a sample mounted on said top surface of said scan tube;   (g) a source of a laser beam mounted for directing said laser beam down said second bore from said top surface of said sample holding block to pass through said probe-carrying module, strike said probe, and be reflected back through said probe-carrying module and down said third bore to an outer end thereof; and,   (h) photoelectric sensor means having an active surface positioned over said outer end of said third bore for developing an electrical signal at an output thereof reflecting the position on said active surface at which said laser beam strikes said active surface.   
     
     
       2. The atomic force microscope of claim 1 wherein: said probe-carrying module is of an optically transparent material whereby said laser beam can pass through said probe-carrying module, strike said probe, and be reflected back through said probe-carrying module.   
     
     
       3. The atomic force microscope of claim 1 wherein: said probe-carrying module is of an optically non-transparent material and has a laser-passing bore therethrough between said top and bottom surfaces aligned so that said laser beam can pas through said laser-passing bore, strike said probe, and be reflected back through said laser-passing bore.   
     
     
       4. The atomic force microscope of claim 1 wherein said probe-carrying module includes an angled pad on said bottom surface thereof and said probe carried by said probe-carrying module comprises; (a) a substrate attached to said pad; and,   (b) and arm of a smooth-surfaced, minimally self-biased material cantilevered outward from a bottom front edge of said substrate to form an optical lever, said arm having a probe point at an outer end thereof.   
     
     
       5. The atomic force microscope of claim 1 wherein: said first support means comprises three first adjusting screws threaded through said base member with said sample holding block resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said sample holding block, another of said top ends disposed in a hole in said bottom surface, and a third of said top ends disposed on said bottom surface whereby said sample holding block is removable from said base member and repeatably replaceable to a pre-established position thereon.   
     
     
       6. The atomic microscope of claim 1 wherein: said second support means comprises three second adjusting screws threaded through said bottom surface of said sample holding block with said probe-carrying module resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said probe-carrying module, another of said top ends disposed in a hole in a member affixed to said bottom surface, and a third of said top ends disposed on said bottom surface whereby said probe-carrying module is removable from said chamber of said sample holding block and repeatedly replaceable to a pre-established position therein.   
     
     
       7. The atomic force microscope of claim 1 wherein said probe-carrying module is of an optically transparent material and additionally comprising: sealing means surrounding said probe and attached to said bottom surface of said probe-carrying module for sealing to a top surface of a sample to form a fluid cell around said probe.   
     
     
       8. The atomic force microscope of claim 7 and additionally comprising: an inlet bore and an outlet bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module whereby fluid can be inserted into said fluid cell.   
     
     
       9. The atomic force microscope of claim 7 and additionally comprising: (a) an electrode bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) an electrode disposed in said electrode bore having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       10. The atomic force microscope of claim 7 and additionally comprising: (a) three electrode bores in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) a working electrode, a reference electrode, and an auxiliary electrode disposed in said electrode bores, each of said electrodes having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       11. The atomic force microscope of claim 1 and additionally comprising: a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source whereby to shield said probe from the effects of said scanning voltages applied to said scan tube.   
     
     
       12. The atomic force microscope of claim 11 wherein: said fixed voltage source is ground.   
     
     
       13. The atomic force microscope of claim 1 and additionally comprising: a slidably moveable and removeable stage releasably attached to said top surface of said scan tube for releasably and adjustably holding a sample to be scanned attached thereto.   
     
     
       14. The atomci force microscope of claim 13 wherein: (a) said stage contains a magnet therein; and additionally comprising,   (b) a voltage shield of a ferro-magnetic and electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       15. The atomic force microscope of claim 13 wherein: (a) said stage is of a ferro-magnetic material; and additionally comprising,   (b) a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield containing a magnet therein, being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube, and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       16. The atomic force microscope of claim 6 and additionally comprising: first calibration means for positioning said member affixed to said bottom surface of said probe-carrying module as a function of the position of a tip portion of said probe.   
     
     
       17. The atomic force microscope of claim 1 and additionally comprising: second calibration means for setting the position of said sample holding block on said first support means.   
     
     
       18. The atomic force microscope of claim 1 and additionally comprising: third calibration means for setting the position of said probe-carrying module on said second support means.   
     
     
       19. An atomic force microscope having extended use capabilities comprising: (a) a horizontal base member;   (b) a scan tube vertically supported at a bottom end by said base member and having a top surface for holding a sample to be scanned and moveable in x-, y-, and z-directions as a result of scanning voltages applied thereto;   (c) first support means extending upward from said base member;   (d) a sample holding block having a chamber therein, said sample holding block having a first bore communicating with said chamber through a bottom surface, a second bore communicating with said chamber through a top surface, and a third bore communicating with said chamber at an acute angle to said second bore, said sample holding block being positioned with said scan tube passing through said first bore and supported by said first support means;   (e) second support means extending upward from said bottom surface into said chamber;   (f) a probe-carrying module having a probe attached thereto and extending downward therefrom at an acute angle with a tip of said probe positioned to contact a sample mounted on said top surface of said scan tube, said probe carried by said probe-carrying module comprising a substrate attached to said probe-carrying module and an arm of a smooth-surfaced, minimally self-biased material cantilevered outward from a bottom front edge of said substrate to form an optical lever, said arm having a probe point at an outer end thereof;   (g) a source of a laser beam mounted for directing said laser beam down said second bore from said top surface of said sample holding block to strike said probe and be reflected down said third bore to an outer end thereof; and,   (h) photoelectric sensor means having an active surface positioned over said outer end of said third bore for developing an electrical signal at an output thereof reflecting the position on said active surface at which said laser beam strikes said active surface.   
     
     
       20. The atomic force microscope of claim 19 wherein: said probe-carrying module has top and bottom surfaces and is removably disposed in said chambeer and supported by said second support means, said bottom surface having said probe attached thereto and extending downward therefrom at an acute angle with respect to said bottom surface of said probe-carrying module and with said tip of said probe positioned to contact a sample mounted on said top surface of said scan tube whereby said laser beam passes through said probe-carrying module, strikes said probe, and is reflected back through said probe-carrying module and down said third bore to said outer end thereof.   
     
     
       21. The atomic force microscope of claim 20 wherein: said probe-carrying module is an optically transparent material whereby said laser beam can pass through said probe-carrying module, strike said probe, and be reflected back through said probe-carrying module.   
     
     
       22. The atomic force microscope of claim 20 wherein: said probe-carrying module is of an optically non-transparent material and has a laser-passing bore therethrough between said top and bottom surfaces aligned so that said laser beam can pass through said laser-passing bore, strike said probe, and be reflected back through said laser-passing bore.   
     
     
       23. The atomic force microscope of claim 19 wherein: said first support means comprises three first adjusting screws threaded through said base member with said sample holding block resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said sample holding block, another of said top ends disposed in a hole in said bottom surface, and a third of said top ends disposed on said bottom surface whereby said sample holding block is removable from said base member and repeatedly replaceable to a pre-established position thereon.   
     
     
       24. The atomic force microscope of claim 19 wherein: said second support means comprises three second adjusting screws threaded through said bottom surface of said sample holding block with said probe-carrying module resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said probe-carrying module, another of said top ends disposed in a hole in a member affixed to said bottom surface, and a third of said top ends disposed on said bottom surface whereby said probe-carrying module is removable from said chamber of said sample holding block and repeatedly replaceable to a pre-established position therein.   
     
     
       25. The atomic force microscope of claim 19 and additionally comprising: means for forming a fluid cell around said probe.   
     
     
       26. The atomic force microscope of claim 25 wherein said means for forming a fluid cell around said probe comprises: a cover plate of an optically transparent material disposed over said probe whereby a drop of fluid can be held between said cover plate and a top surface of a sample by capillary action whereby said laser beam can pass through said cover plate, strike said probe, and be reflected back through said cover plate.   
     
     
       27. The atomic force microscope of claim 25 wherein said probe-carrying module is of an optically transparent material and said means for forming a fluid cell around said probe comprises: sealing means surrounding said probe and attached to said bottom surface of said probe-carrying module for sealing to a top surface of a sample to form a fluid cell around said probe.   
     
     
       28. The atomic force microscope of claim 27 and additionally comprising: an inlet bore and an outlet bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module whereby fluid can be inserted into said fluid cell.   
     
     
       29. The atomic force microscope of claim 27 and additionally comprising: (a) an electrode bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) an electrode disposed in said electrode bore having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       30. The atomic force microscope of claim 27 and additionally comprising: (a) three electrode bores in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) a working electrode, a reference electrode, and an auxiliary electrode disposed in said electrode bores, each of said electrodes having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       31. The atomic force microscope of claim 19 and additionally comprising: a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source whereby to shield said probe from the effects of said scanning voltages applied to said scan tube.   
     
     
       32. The atomic force microscope of claim 31 wherein: said fixed voltage source is ground.   
     
     
       33. The atomic force microscope of claim 19 and additionally comprising: a slidably moveable and removable stage releasably attached to said top surface of said scan tube for releasably and adjustably holding a sample to be scanned attached thereto.   
     
     
       34. The atomic force microcscope of claim 33 wherein: (a) said stage contains a magnet therein; and additionally comprising,   (b) a voltage shield of a ferro-magnetic and electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       35. The atomic force microscope of claim 33 wherein: (a) said stage is of a ferro-magnetic material; and additionally comprising,   (b) a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield containing a magnet therein, being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube, and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       36. The atomic force microscope of claim 24 and additionally comprising: first calibration means for positioning said member affixed to said bottom surface of said probe-carrying module as a function of the position of a tip position of said probe.   
     
     
       37. The atomic force microscope of claim 19 and additionally comprising: second calibration means for setting the position of said sample holding block on said first support means.   
     
     
       38. The atomic force microscope of claim 19 and additionally comprising: third calibration means for setting the position of said probe-carrying module on said second support means.   
     
     
       39. An atomic force microscope containing an easily replaceable probe-carrying member including an optional fluid cell comprising: (a) a horizontal base member;   (b) a scan tube vertically supported at a bottom end by said base member and having a top surface for holding a sample to be scanned and moveable in x-, y-, and z-directions as a result of scanning voltages applied thereto;   (c) first support means extending upward from said base member;   (d) a sample holding block having a chamber therein, said sample holding block having a first bore communicating with said chamber through a bottom surface, a second bore communicating with said chamber through a top surface, and a third bore communicating with said chamber at an acute angle to said second bore, said sample holding block being positioned with said scan tube passing through said first bore and supported by said first support means;   (e) second support means extending upward from said bottom surface into said chamber;   (f) a probe-carrying module of an optically transparent material having top and bottom surfaces removably disposed in said chamber and supported by said second support means, said bottom surface having a probe attached thereto and extending downward therefrom at an acute angle with respect to said bottom surface of said probe-carrying module and with a tip of said probe positioned to contact a sample mounted on said top surface of said scan tube, said probe-carrying module including an angled pad on said bottom surface thereof and said probe carried by said probe-carrying module comprising, (f1) a substrate attached to said pad, and   (f2) an arm of a smooth-surfaced, minimally self-biased material cantilevered outward from a bottom front edge of said substrate to form an optical lever, said arm having a probe point at an outer end thereof;     (g) sealing means surrounding said probe and attached to said bottom surface of said probe-carrying module for sealing to a top surface of a sample to form a fluid cell around said probe;   (h) a source of a laser beam mounted for directing said laser beam down said second bore from said top surface of said sample holding block to pass through said probe-carrying module, strike said probe, and be reflected back through said probe-carrying module and down said third bore to an outer end thereof; and,   (i) photoelectric sensor means having an active surface positioned over said outer end of said third bore for developing an electrical signal at an output thereof reflecting the position of said active surface at which said laser beam strikes said active surface.   
     
     
       40. The atomic force microscope of claim 39 wherein: said first support means comprises three first adjusting screws threaded through said base member with said sample holding block resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said sample holding block, another of said top ends disposed in a hole in said bottom surface, and a third of said top ends disposed on said bottom surface whereby said sample holding block is removable from said base member and repeatedly replaceable to a pre-established position thereon.   
     
     
       41. The atomic force microscope of claim 39 wherein: said second support means comprises three second adjusting screws threaded through said bottom surface of said sample holding block with said probe-carrying module resting on top ends thereof with one of said top ends disposed in a slot in a flat bottom surface of said probe-carrying module, another of said top ends disposed in a hole in a member affixed to said bottom surface, and a third of said top ends disposed on said bottom surface whereby said probe-carrying module is removable from said chamber of said sample holding block and repeatably replaceable to a pre-established position therein.   
     
     
       42. The atomic force microscope of claim 39 and additionally comprising: an inlet bore and an outlet bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module whereby fluid can be inserted into said fluid cell.   
     
     
       43. The atomic force microscope of claim 39 and additionally comprising: (a) an electrode bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) an electrode disposed in said electrode bore having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       44. The atomic force microscope of claim 39 and additionally comprising: (a) three electrode bores in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) a working electrode, a reference electrode, and an auxiliary electrode disposed in said electrode bores, each of said electrodes having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       45. The atomic force microscope of claim 39 and additionally comprising: a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source whereby to shield said probe from the effects of said scanning voltages applied to said scan tube.   
     
     
       46. The atomic force microscope of claim 39 and additionally comprising: a slidably moveable and removable stage releasably attached to said top surface of said scan tube for releasably and adjustably holding a sample to be scanned attached thereto.   
     
     
       47. The atomic force microscope of claim 46 wherein: (a) said stage contains a magnet therein; and additionally comprising,   (b) a voltage shield of a ferro-magnetic and electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       48. The atomic force microscope of claim 46 wherein: (a) said stage is of a ferro-magnetic material; and additionally comprising,   (b) a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield containing a magnet therein, being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube, and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       49. An atomic force microscope including an fluid cell surrounding a scanning probe for preventing damage to a scanned sample and the scanning probe comprising: (a) a horizontal base member;   (b) a scan tube vertically supported at a bottom end by said base member and having a top surface for holding a sample to be scanned and moveable in x-, y-, and z-directions as a result of scanning voltages applied thereto;   (c) a probe-carrying module disposed above said top surface of said scan tube and having a probe attached thereto and extending downward therefrom with a tip of said probe positioned to contact a sample mounted on said top surface of said scan tube;   (d) means for sensing movement of said probe and for providing an electrical signal at an output thereof reflecting said movement of said probe; and,   (e) fluid cell forming means carried by said probe-carrying module for forming a fluid cell around said probe on a top surface of a sample mounted on said top surface of said scan tube when filled with a fluid.   
     
     
       50. The atomic force microscope of claim 49 wherein: said fluid cell forming means comprises a cover glass disposed over said probe and close enough to said top surface of said sample to maintain a drop of fluid between said top cover glass and said surface of said sample around said probe by capillary action.   
     
     
       51. The atomic force microscope of claim 49 wherein: said fluid cell forming means comprises annular sealing means surrounding said probe and attached to a bottom surface of said probe-carrying module for sealing to said top surface of said sample to form a fluid cell around said probe.   
     
     
       52. The atomic force microscope of claim 51 and additionally comprising: an inlet bore and an outlet bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module whereby fluid can be inserted into said fluid cell.   
     
     
       53. The atomic force microscope of claim 51 and additionally comprising: (a) an electrode bore in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) an electrode disposed in said electrode bore having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       54. The atomic force microscope of claim 51 and additionally comprising: (a) three electrode bores in said probe-carrying module communicating between said fluid cell and the exterior of said probe-carrying module; and,   (b) a working electrode, a reference electrode, and an auxiliary electrode disposed in said electrode bores, each of said electrodes having a first end within said fluid cell and a second end at the exterior of said probe-carrying module to which electrical connection can be made.   
     
     
       55. The atomic force microscope of claim 51 and additionally comprising: a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source whereby to shield said probe from the effects of said scanning voltages applied to said scan tube.   
     
     
       56. The atomic force microscope of claim 51 and additionally comprising: a slidably moveable and removable stage releasably attached to said top surface of said scan tube for releasably and adjustably holding a sample to be scanned attached thereto.   
     
     
       57. The atomic force microscope of claim 56 wherein: (a) said stage contains a magnet therein; and additionally comprising:   (b) a voltage shield of a ferro-magnetic and electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube and providing an attachment surface to which said stage can magnetically attach and upon which it can slide.   
     
     
       58. The atomic force microscope of claim 56 wherein: (a) said stage is of a ferro-magnetic material; and additionally comprising,   (b) a voltage shield of an electrically conductive material disposed over said top surface of said scan tube in non-electrical contact therewith, said voltage shield containing a magnet therein, being electrically connected to a fixed voltage source to shield said probe from the effects of said scanning voltages applied to said scan tube, and providing an attachment surface to which said stage can magnetically attach and upon which it can slide. .Iadd.59. An atomic force microscope for determining a characteristic of a sample, comprising:   a probe adapted to scan said sample;   scanning means for causing relative scanning movement between said probe and said sample;   sensing means for sensing a position of said probe; and   a non-cryogenic fluid body in communication with said sample and in which said probe is immersed in contact with said sample so that during said relative scanning movement capillary attraction between said probe and said sample, caused by a surface film formed on said sample due to exposure to ambient atmosphere, is reduced. .Iaddend. .Iadd.60. The atomic force microscope according to claim 59, further comprising:   a rigid cover plate disposed on a top surface of said fluid body to define a fluid cell between said cover plate and said sample. .Iaddend..Iadd.61. The atomic force microscope according to claim 60, wherein:   said rigid cover plate comprises an optically transparent material; and   said sensing means comprises optical means for sensing a vertical movement of said probe by means of light applied to said probe through said rigid cover plate. .Iaddend. .Iadd.62. The atomic force microscope according to claim 59, comprising:   means for exchanging fluid within said fluid body. .Iaddend. .Iadd.63. The atomic force microscope according to claim 59, further comprising;   two or more electrodes in contact with said fluid body for performing an electrochemical reaction. .Iaddend. .Iadd.64. The atomic force microscope according to claim 60, further comprising;   two or more electrodes in contact with said fluid body for performing an electrochemical reaction. .Iaddend. .Iadd.65. The atomic force microscope according to claim 61, further comprising;   two or more electrodes in contact with said fluid body for performing an electrochemical reaction. .Iaddend. .Iadd.66. The atomic force microscope according to claim 62, further comprising;   two or more electrodes in contact with said fluid body for performing an electrochemical reaction. .Iaddend. .Iadd.67. The atomic force microscope according to claim 59, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.68. The atomic force microscope according to claim 60, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.69. The atomic force microscope according to claim 61, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.70. The atomic force microscope according to claim 62, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.71. The atomic force microscope according to claim 63, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.72. The atomic force microscope according to claim 64, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.73. The atomic force microscope according to claim 65, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.74. The atomic force microscope according to claim 66, wherein said scanning means comprises:   a scanner; and   a conductive shield element at a fixed potential disposed between said probe and said scanner for electrically shielding said probe from said scanner. .Iaddend. .Iadd.75. The atomic force microscope according to claim 59, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.76. The atomic force microscope according to claim 75, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.77. The atomic force microscope according to claim 61, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.78. The atomic force microscope according to claim 77, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.79. The atomic force microscope according to claim 62, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.80. The atomic force microscope according to claim 79, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.81. The atomic force microscope according to claim 63, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.82. The atomic force microscope according to claim 81, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.83. The atomic force microscope according to claim 65, further comprising:   a removable problem module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.84. The atomic force microscope according to claim 83, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.85. The atomic force microscope according to claim 66, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.86. The atomic force microscope according to claim 85, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.87. The atomic force microscope according to claim 67, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.88. The atomic force microscope according to claim 87, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.89. The atomic force microscope according to claim 69, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.90. The atomic force microscope according to claim 89, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.91. The atomic force microscope according to claim 70, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.92. The atomic force microscope according to claim 91, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.93. The atomic force microscope according to claim 71, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.94. The atomic force microscope according to claim 93, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.95. The atomic force microscope according to claim 72, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.96. The atomic force microscope according to claim 95, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.97. The atomic force microscope according to claim 73, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.98. The atomic force microscope according to claim 97, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.99. The atomic force microscope according to claim 74, further comprising:   a removable probe module on which said probe is fixedly mounted at a selected location. .Iaddend. .Iadd.100. The atomic force microscope according to claim 99, further comprising:   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said sensing means so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said sensing means. .Iaddend. .Iadd.101. The atomic force microscope according to claim 59, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.102. The atomic force microscope according to claim 101, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.103. The atomic force microscope according to claim 60, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.104. The atomic force microscope according to claim 103, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.105. The atomic force microscope according to claim 63, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.106. The atomic force microscope according to claim 105, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.107. The atomic force microscope according to claim 67, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.108. The atomic force microscope according to claim 107, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.109. The atomic force microscope according to claim 76, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.110. The atomic force microscope according to claim 109, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.111. The atomic force microscope according to claim 87, further comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.112. The atomic force microscope according to claim 111, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.113. The atomic force microscope according to claim 59, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.114. The atomic force microscope according to claim 113, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.115. The atomic force microscope according to claim 60, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.116. The atomic force microscope according to claim 115, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.117. The atomic force microscope according to claim 63, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.118. The atomic force microscope according to claim 117, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.119. The atomic force microscope according to claim 67, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.120. The atomic force microscope according to claim 119, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.121. The atomic force microscope according to claim 76, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.122. The atomic force microscope according to claim 121, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.123. The atomic force microscope according to claim 87, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.124. The atomic force microscope according to claim 123, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.125. The atomic force microscope according to claim 106, comprising:   a support on which said sensing means is mounted; and   means mounted on said support for adjusting positioning of said sensing means. .Iaddend. .Iadd.126. The atomic force microscope according to claim 125, comprising:   said sensing means comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected of said probe is incident on said detector. .Iaddend. .Iadd.127. In an atomic force microscope having a deflection detection system for detecting a deflection of a lever mounted probe as said probe is scanned across a surface of a sample by a means for scanning the sample, the improvement comprising:   a non-cryogenic fluid body in communication with said surface of the sample and in which said probe is immersed in contact with said sample while said probe is scanned across the surface of the sample. .Iaddend. .Iadd.128. The atomic force microscope according to claim 127, further comprising:   a rigid cover plate disposed on a top surface of said fluid body to define a fluid cell between said cover plate and said sample. .Iaddend. .Iadd.129. The atomic force microscope according to claim 128, wherein:   said rigid cover plate comprises an optically transparent material; and   said deflection detection system comprises optical means for sensing a vertical movement of said probe by means of light applied to said probe through said rigid cover plate. .Iaddend. .Iadd.130. The atomic force microscope according to claim 127, further comprising:   two or more electrodes in contact with said fluid body for performing an electrochemical reaction. .Iaddend. .Iadd.131. In an atomic force microscope having a deflection detection system for detecting a deflection of a lever mounted probe as said probe is scanned across a surface of a sample, the improvement comprising:   a scanner for scanning said probe; and   a conductive shield at a fixed potential disposed between said probe and said scanner. .Iaddend. .Iadd.132. The atomic force microscope according to claim 131, wherein said scanner comprises a piezoelectric tube and said conductive shield is mounted on a distal end of said tube between said tube and said probe. .Iaddend. .Iadd.133. In a method of operating an atomic force microscope in which a lever mounted probe is scanned across the surface of a sample by a scanner and a deflection of said lever mounted probe is detected by a deflection detection system, the improvement comprising:   providing a fluid body in communication with the surface of the sample and not in communication with said scanner;   immersing said lever mounted probe in said fluid body; and   scanning said lever mounted probe across the suface of the sample while said lever mounted probe is immersed in said fluid body. .Iaddend. .Iadd.134. The method according to claim 133, comprising:   placing two or more electrodes in contact with said fluid body; and   applying a voltage across said electrodes during said scanning step to produce an electrochemical reaction in said fluid. .Iaddend. .Iadd.135. In an atomic force microscope having a deflection detection system for detecting a deflection of a lever mounted probe as said probe is scanned across a surface of a sample, the improvement comprising:   a removable probe module on which said probe fixedly mounted at a selected location; and   a probe module support mechanically coupled to said probe module during operation of said atomic force microscope and having a predetermined spatial arrangement with said deflection detection system so that when said probe module is mechanically coupled to said probe module support, said probe is in substantial alignment with said deflection detection system. .Iaddend. .Iadd.136. In an atomic force microscope having a deflection detection system for detecting a deflection of a lever mounted probe as said probe is scanned across a surface of a sample by a means for scanning the sample, the improvement comprising:   a slidably moveable and removable sample support releasably coupled to said scanning means and on which said sample is mounted. .Iaddend. .Iadd.137. The atomic force microscope according to claim 136, further comprising:   magnetic means for magnetically mechanically coupling said sample support to said scanning means. .Iaddend. .Iadd.138. In an atomic force microscope having a deflection detection ssystem for detecting deflection of a lever mounted probe as said probe is scanned by a scanner across a surface of a sample, the improvement comprising:   a support on which said deflection detection system and said probe are mounted; and   means mounted on said support for adjusting positioning of said deflection detection system. .Iaddend. .Iadd.139. The atomic force microscope according to claim 138, further comprising:   said deflection detection system comprising a light beam source and a light beam detector; and   said adjusting means comprising means for adjusting positioning of at least one of said light beam source and said light beam detector so that a light beam output by said source and reflected off said probe is incident on said detector. .Iaddend.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.