Substrate gripper device for spin drying

Abstract

A substrate gripper device for gripping a substrate has a rotatable substrate stage, a plurality of fixing fingers vertically mounted on an outer edge of the rotatable substrate stage and having respective horizontal substrate rests for placing thereon an outer edge of the substrate, and a plurality of swing fingers angularly movably supported on the fixing fingers, respectively, for vertically gripping the substrate in coaction with the fixing fingers. The swing fingers are normally biased to move in a closing direction toward the fixing fingers, respectively, by helical springs acting on the swing fingers. A plurality of opening pins are vertically movably disposed below the swing fingers, respectively, and movable upwardly for angularly moving the swing fingers in the opening direction against biasing forces of the helical springs. An opening mechanism is vertically movably disposed below the substrate stage for simultaneously moving the opening pins upwardly.

What is claimed is:  
     
       1. A substrate gripper device for gripping a substrate, comprising: 
       a rotatable substrate stage;  
       a plurality of fixing fingers mounted on an outer edge of said rotatable substrate stage and having respective substrate rests for placing thereon an outer edge of the substrate;  
       a plurality of swing fingers angularly movably supported on said fixing fingers, respectively, for gripping the substrate in coaction with fixing fingers;  
       biasing means for normally biasing said swing fingers to move in a closing direction toward said fixing fingers;  
       a plurality of opening pins disposed below said swing fingers, and movable upwardly for angularly moving said swing fingers in an opening direction against biasing forces of said biasing means; and  
       an opening mechanism disposed below said substrate stage for simultaneously moving said opening pins upwardly.  
     
     
       2. A substrate gripper device according to claim  1 , wherein said biasing means comprises a plurality of helical springs acting on said swing fingers, respectively. 
     
     
       3. A substrate gripper device according to claim  1 , wherein said swing finger has a cut-out portion at the front end thereof. 
     
     
       4. A substrate gripper device according to claim  1 , wherein said opening mechanism comprises a vertically movable cylindrical sleeve and an annular member fixed to an upper end of said vertically movable cylindrical sleeve, said annular member having an upwardly facing annular surface engageable with lower ends of said opening pins. 
     
     
       5. A substrate gripper device according to claim  1 , wherein said substrate stage is controlled to stop rotating in order to bring said opening pins above said opening mechanism. 
     
     
       6. A substrate gripper device for gripping a substrate, comprising: 
       
         a rotatable substrate stage;  
       
       
         a plurality of fixing fingers mounted on an outer edge of said rotatable substrate stage and having respective substrate rests for placing thereon an outer edge of the substrate;  
       
       
         a plurality of swing fingers angularly movably supported on said fixing fingers, respectively, for gripping the substrate in coaction with said fixing fingers;  
       
       
         biasing means for normally biasing said swing fingers to move in a closing direction toward said fixing fingers; and  
       
       
         an opening mechanism for moving said swing fingers in an opening direction against biasing forces of said biasing means.