300 mm microenvironment pod with door on side

Abstract

A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

1. A container for creating a microenvironment which protects items stored therein from damage, said container including:
 (a) a shell having an opening for insertion and removal of items from said shell, said shell made of a material which inherently possess a slightly negative electrical charge;   (b) a pair of supports which cooperate to retain a plurality of items stored in the container in a parallel, spaced apart position with respect to each other;   (c) a door for sealing said opening of said shell to prevent contamination of the items stored in said shell; and   (d) means for creating an electrical path through which such supports are grounded so that particles within the shell are drawn away from said items and supports and toward the shell of said container.   
     
     
       2. The container of  claim 1 , wherein said items stored in the container are semiconductor wafers. 
     
     
       3. The container of  claim 1  further including a pair of handles located on opposite sides of the container's center of gravity. 
     
     
       4. The container of  claim 3  wherein each of said handles has a groove including an alignment notch so that the handle can be securely gripped by a robot. 
     
     
       5. The container of  claim 1  further including a kinematic coupling plate secured to the exterior of said shell by a plurality of posts, said kinematic coupling plate having three alignment grooves each of said alignment grooves having a cross section which is generally a Y-shape. 
     
     
       6. The container of  claim 5  wherein said alignment grooves of said kinematic coupling plate are used to align the container door with the port of a tool used to process semiconductor wafers so that a seal is created around the shell's opening and the tool's port before the container's door is opened and the wafers are withdrawn from the shell, through the port, and into the tool for processing. 
     
     
       7. The container of  claim 1  further including a kinematic coupling plate secured to the exterior of the shell, said kinematic coupling plate being made of an electrically conductive material. 
     
     
       8. The container of  claim 7  wherein said means for creating an electrical path through which the supports are grounded includes an electrically conductive connection between each of said supports and said kinematic coupling plate. 
     
     
       9. The container of  claim 1  wherein said door includes means on its exterior surface for coupling said door to another surface. 
     
     
       10. The container of  claim 1  wherein each of said supports is releasably secured to the shell so that such supports can be removed for cleaning or replacement. 
     
     
       11. The container of  claim 2  wherein said supports have a plurality of channels, each of said channels having a backside which is curved in the circumferential direction. 
     
     
       12. The container of  claim 11  wherein the radius of curvature of the backside of said channels in the circumferential direction is generally the same as the radius of curvature in the circumferential direction of said wafers. 
     
     
       13. The container of  claim 2  wherein each of said pair of supports include a plurality of wafer dividers, each of said wafer dividers having a continuously varying slope to help support one of said semiconductor wafers. 
     
     
       14. A container for creating a microenvironment which protects items stored therein from damage, said container including:
 (a) a shell having an opening for insertion and removal of items from said shell;   (b) a pair of supports which cooperate to retain a plurality of items stored in the container in a parallel, spaced apart position with respect to each other, each of said supports having a plurality of channels, each of said channels having a backside, at least a portion of which is curved in the circumferential direction;   (c) a door for sealing said opening of said shell to prevent contamination of the items stored in said shell; and   (d) means for kinematically coupling said container to another surface.   
     
     
       15. The container of  claim 14  wherein the curved portion of the backside of each channel has a radius of curvature in the circumferential direction which is generally the same as the radius of curvature in the circumferential direction of the items to be stored. 
     
     
       16. The container of  claim 14  wherein said supports are releasably secured to said shell. 
     
     
       17. The container of  claim 14  further including means for providing an electrical path through which said supports are electrically grounded so that particles within the shell are drawn away from said items and supports and toward the shell of said container. 
     
     
       18. The container of  claim 14  wherein said means for kinematically coupling said container to said surface includes at least three grooves on said container which each mate with separate projections on said surface. 
     
     
       19. The container of  claim 14  wherein said means for kinematically coupling said container to said surface includes at least three projections on said container with each mating with separate grooves on the surface. 
     
     
       20. The container of  claim 14  wherein said door has a cushion on its interior surface which assists said pair of supports to reduce movement and vibration of items stored in the container during transport. 
     
     
       21. The container of  claim 14  wherein each of said pair of supports have a plurality of dividers, each divider shaped to have a continuously varying slope to help support a wafer. 
     
     
       22. A container for creating a microenvironment which protects items stored therein from damage, said container comprising:
 (a) a shell having a top wall, a bottom wall, a pair of opposing side walls, a back wall, and a door frame opposite the back wall defining an opening for insertion and removal of items from the shell, the back wall including a pair of spaced-apart cross brace structures extending from the top wall to the bottom wall;   (b) a kinematic coupling on the exterior of the shell, the kinematic coupling defining a plurality of coupling grooves;   (c) a plurality of support portions in the shell which cooperate to retain a plurality of items stored in the container in a parallel, spaced apart position with respect to each other; and   (d) a door for sealing said opening of said shell to prevent contamination of the items stored in the shell.   
     
     
       23. The container of claim 22, wherein each of said support portions defines a plurality of channels. 
     
     
       24. The container of claim 23, wherein each of the plurality of channels has a backside curved in a circumferential direction. 
     
     
       25. The container of claim 22, wherein each of the support portions is releasably secured in the shell. 
     
     
       26. A container for creating a microenvironment which protects semiconductor wafers stored therein from damage, the container comprising a shell having a plurality of sides and a plurality of wafer supports in the shell, the wafer supports cooperatingly positioned to retain a plurality of wafers stored in the container in parallel, spaced apart registration with respect to each other, a first one of the plurality of sides including a door frame defining an opening for insertion and removal of the wafers from the shell, a second one of the sides adjacent the first side and oriented substantially parallel to the wafers, the second side having a kinematic coupling on an exterior surface thereof for aligning the opening with an automated wafer processing tool, the kinematic coupling including structure defining a plurality of coupling grooves, a third one of the sides opposite the first side including a pair of spaced-apart elongate cross-brace structures, the cross-brace structures oriented generally perpendicular to the second side, the container further comprising a door removably positionable in the door frame to close the opening. 
     
     
       27. The container of claim 26, wherein the wafer supports are electrically coupled to the kinematic coupling. 
     
     
       28. The container of claim 26, wherein each wafer support defines a plurality of channels. 
     
     
       29. The container of claim 28, wherein each channel has a backside curved in a circumferential direction. 
     
     
       30. The container of claim 26, wherein the wafer supports are releasably secured in the shell. 
     
     
       31. A container for creating a microenvironment which protects a plurality of semiconductor wafers stored therein from damage, said container comprising:
 (a) a shell having a plurality of sides, a first one of the plurality of sides including a door frame defining an opening for insertion and removal of the wafers from the shell, a second one of the sides adjacent the first side and oriented substantially parallel to the wafers, a third one of the sides opposite the first side defining a pair of elongate spaced-apart cross brace structures oriented generally perpendicular to the second side;   (b) a kinematic coupling on an exterior surface of the second side, the kinematic coupling having a plurality of coupling grooves;   (c) a plurality of wafer supports in the shell which cooperate to retain the plurality of semiconductor wafers stored in the container in a parallel, spaced apart registration, the wafer supports being releasably secured in the shell;   (d) a door for sealing said opening of the shell.   
     
     
       32. The container of claim 31, wherein each of said wafer supports defines a plurality of channels. 
     
     
       33. The container of claim 32, wherein each of the plurality of channels has a backside curved in a circumferential direction. 
     
     
       34. The container of claim 31, wherein the wafer supports are electrically coupled to the kinematic coupling.