Liquid feed nozzle, wet treatment, apparatus and wet treatment method

Abstract

The wet treatment liquid feed nozzle of the invention comprises an introducing path 10 having an introducing port 7, a discharging path 12 having a discharging port 15, a crossing section 14 formed by causing the introducing path 10 and the discharging path 12 to cross at the other ends thereof, a nozzle assembly 50 having an opening section 6 opening to an object to be treated 1, provided at the crossing section 14, and pressure control means 13, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated 1 and the atmospheric pressure provided at least on the discharging path 12 side so that the wet treatment liquid having been in contact with the object to be treated 1 via the opening section 6 does not flow to outside the discharging path 12.

1. A wet treatment liquid feed apparatus for subjecting an object to a wet treatment therein, the wet treatment liquid feed apparatus comprising:
 a nozzle assembly including:
 an introducing pipe having an introducing port to introduce the wet treatment liquid at an end thereof; 
 a discharging pipe having a discharging port at an end thereof to discharge the wet treatment liquid to outside the discharging pipe after the object has been subjected to the wet treatment; 
 a crossing section comprising a ceiling formed by connecting another end of said introducing pipe and an other end of said discharging pipe, respectively, the ceiling thereby providing a lateral spacing between the other end of the introducing pipe and the other end of the discharging pipe; and 
 an opening section provided at a bottom of said crossing section and open to the object to be subjected to the wet treatment; and 
 
 a pressure controller to control a difference between a pressure of the wet treatment liquid in contact with the object to be wet-treated and an atmospheric pressure to prevent the wet treatment liquid in contact with the object to be subjected to the wet treatment via said opening section from flowing to outside said discharging pipe, and 
 an ultrasonic mechanism to impart an ultrasonic wave to the wet treatment liquid, the ultrasonic mechanism operating at a frequency of at least 19 KHz, 
 wherein the pressure controller controls the pressure of the wet treatment liquid, including a surface tension of the wet treatment liquid on the object to be wet-treated, such that the pressure of the wet treatment liquid, including the surface tension of the wet treatment liquid on the object to be wet-treated, is substantially equal to the atmospheric pressure. 
 
     
     
       2. A wet treatment liquid feed apparatus according to  claim 1 , further comprising an ultrasonic mechanism to impart an ultrasonic wave to said wet treatment liquid. 
     
     
       3. A wet treatment liquid feed apparatus according to  claim 1 , wherein a portion of a ceiling opposite to the treatment surface of said object to be wet-treated is formed into a waved shape having a plurality of steps, and a plurality of ultrasonic elements are provided at an angle to the treatment surface of the object to be wet-treated on said stepped portion. 
     
     
       4. A wet treatment liquid feed apparatus according to  claim 1 , wherein said discharging pipe is formed at a center of one side of said crossing section and two introducing pipes are formed around a center of another side of said crossing section. 
     
     
       5. A wet treatment liquid feed apparatus according to  claim 1 , wherein said introducing pipe is formed at a center of one side of said crossing section and two discharging pipes are formed around a center of another side of said crossing section. 
     
     
       6. A wet treatment liquid feed apparatus according to  claim 1 , wherein there is provided a measuring section capable of measuring the length of the distance to the wet treatment surface of said object to be wet-treated. 
     
     
       7. A wet treatment apparatus according to  claim 1 , comprising:
 a displacement mechanism to displace said wet treatment liquid feed apparatus and said object to be subjected to wet treatment relative to each other; 
 a wet treatment liquid feed source to supply the wet treatment liquid; and 
 a feeding mechanism to feed said wet treatment liquid from said wet treatment liquid feed source to the introducing port of said wet treatment liquid feed apparatus. 
 
     
     
       8. A wet treatment liquid feed apparatus of  claim 1 , wherein the crossing section is substantially rectangularly parallelepiped. 
     
     
       9. A wet treatment liquid feed apparatus of  claim 1 , wherein the introducing pipe extends upwards from a longitudinal side of the crossing section. 
     
     
       10. A wet treatment liquid feed apparatus of  claim 1 , wherein the discharging pipe extends upwards from a longitudinal side of the crossing section. 
     
     
       11. A wet treatment liquid feed apparatus of  claim 1 , wherein the crossing section is substantially rectangularly parallelepiped and the introducing pipe and discharging pipe extends upwards from opposing longitudinal sides of the crossing section. 
     
     
       12. A system for treating a surface segment of an object with treatment material, the system comprising:
 a treatment cavity comprising a ceiling, the cavity substantially free from air;   an entry through which the treatment material enters the cavity;   a exit through which the treatment material exits the cavity, the exit being disposed a lateral distance away from the entry as defined by the ceiling;   an opening in the cavity located in the cavity for exposing the surface segment to the treatment material, and   an ultrasonic mechanism to impart an ultrasonic wave to the wet treatment liquid, the ultrasonic mechanism operating at a frequency of at least 19 KHz,   wherein the treatment material comprises a liquid and the pressure of the treatment material, including a surface tension of the treatment material on the object to be wet-treated, is substantially equal to an atmospheric pressure.    
     
     
       13. The system of claim 12, further comprising a displacement mechanism to displace the system and the object relative to each other.  
     
     
       14. The system of claim 12, further comprising a controller to maintain a constant distance between the opening and the surface.  
     
     
       15. The system of claim 12, wherein the cavity has a plurality of compartments.  
     
     
       16. The system of claim 12, wherein the treatment material forms a seal.  
     
     
       17. The system of claim 16, further comprising a controller that controls a pressure difference between a pressure of the treatment material and pressure external to the system.  
     
     
       18. The system of claim 16, further comprising a lattice defining multiple apertures at the opening.  
     
     
       19. The system of claim 12, further comprising one of an auxiliary entry and an auxiliary exit disposed between the exit and the surface and that communicates with the cavity.  
     
     
       20. The system of claim 12, further comprising an extension that extends inward from the edge such that the opening is smaller than an area defined by the edge.  
     
     
       21. The system of claim 12, wherein a seal comprising one of cilia and a film substantially prevents flow of the treating material from the opening.  
     
     
       22. The system of claim 12, further comprising an auxiliary entry disposed between the exit and the entry and communicating with the exit such that new treatment material may be introduced into the exit.  
     
     
       23. The system of claim 12, further comprising a parallel flow section in parallel with the surface, the parallel flow section formed in at least one of the entry, the exit and between the entry and exit.  
     
     
       24. The system of claim 12, further comprising at least two entries with the exit disposed between the entries.  
     
     
       25. The system of claim 12, further comprising at least two exits with the entry disposed between the exits.  
     
     
       26. The system of claim 12, wherein an area of the opening is variable.  
     
     
       27. The system of claim 12, wherein a ceiling of the cavity has a plurality of stepped portions, at least one of an ultrasonic element and radiation source is provided on the stepped portions such that the at least one of the ultrasonic element and radiation source is oriented non-parallel to the surface of the object.  
     
     
       28. The apparatus of claim 12, wherein a seal comprising a film substantially prevents flow of the treating material from the opening.  
     
     
       29. The wet treatment liquid feed apparatus of claim 12, wherein the frequency is within a range of from 0.2 to 5 MHz.  
     
     
       30. The wet treatment liquid feed apparatus of claim 12, wherein the ultrasonic mechanism is disposed at an angle with respect to the surface segment of the object.  
     
     
       31. The wet treatment liquid feed apparatus of claim 30, wherein the angle is in the range of from 2° to 45°.  
     
     
       32. The wet treatment liquid feed apparatus of claim 12, wherein the ultrasonic mechanism is disposed on the ceiling of the treatment cavity.  
     
     
       33. The wet treatment liquid feed apparatus of claim 12, further comprising a mechanism for causing a relative displacement of the object to be wet treated and the treatment cavity.  
     
     
       34. An apparatus to subject a portion of a surface of an object to a treatment material, the apparatus comprising:
 a treating section having an opening through which the object is exposed to the treating section;   two or more introducing conduits from which the treatment material is introduced to the treating section; and   a discharging conduit from which the treatment material is discharged,   wherein the treatment material removes particles at the surface of the object and the apparatus maintains sufficient contact efficiency between the surface and the treatment material to substantially prevent re-adhesion of the particles to the object,   wherein the treatment material comprises a liquid and the pressure of the treatment material, including a surface tension of the treatment material on the object to be wet-treated, is substantially equal to an atmospheric pressure, and   wherein the discharging conduit is provided at a right angle to the portion of the surface and the introducing conduits are symmetrically provided about the discharging conduit.    
     
     
       35. The apparatus of claim 34, further comprising a displacement mechanism to displace the apparatus and the object relative to each other.  
     
     
       36. The apparatus of claim 34, further comprising a controller to maintain a constant distance between the opening and the surface.  
     
     
       37. The apparatus of claim 34, wherein the treating section has a plurality of compartments.  
     
     
       38. The apparatus of claim 34, wherein the treatment material forms a seal, a pressure difference between a pressure of the treatment material and pressure external to the apparatus controlled by a controller.  
     
     
       39. The apparatus of claim 34, further comprising a lattice defining multiple apertures at the opening.  
     
     
       40. The apparatus of claim 34, further comprising an auxiliary conduit disposed between the exit and the surface and that communicates with the crossing section.  
     
     
       41. The apparatus of claim 34, further comprising an extension that extends inward from an edge of the treating section such that the opening is smaller than an area defined by the edge of the treating section.  
     
     
       42. The apparatus of claim 34, wherein a seal comprising one of cilia and a film substantially prevents flow of the treating material from the opening.  
     
     
       43. The apparatus of claim 34, further comprising an auxiliary introducing conduit disposed between the discharging conduit and the introducing conduit and communicating with the exit such that new treatment material may be introduced into the exit.  
     
     
       44. The apparatus of claim 34, further comprising a parallel flow section in parallel with the surface, the parallel flow section formed in at least one of the introducing conduit, the discharging conduit, and between the introducing conduit and discharging conduit.  
     
     
       45. The apparatus of claim 34, further comprising at least two introducing conduits with the discharging conduit disposed between the introducing conduits.  
     
     
       46. The apparatus of claim 34, further comprising at least two discharging conduits with the introducing conduits disposed between the discharging conduits.  
     
     
       47. The apparatus of claim 34, wherein an area of the opening is variable.  
     
     
       48. The apparatus of claim 34, wherein a ceiling of the crossing section has a plurality of stepped portions, at least one of an ultrasonic element and radiation source is provided on the stepped portions such that the at least one of the ultrasonic element and radiation source is oriented non-parallel to the surface of the object.  
     
     
       49. An apparatus to subject an object to a treatment material, the apparatus comprising:
 a nozzle assembly including:
 two or more introducing pipes each having an introducing port to introduce the treatment material; 
 a discharging pipe having a discharging port to discharge the treatment material to outside the discharging pipe after treatment material has contacted the object; 
 a crossing section connecting each of the introducing pipes and the discharging pipe; and 
 an opening provided adjacent to the crossing section to allow the treatment material to contact the object and define a contact region; and 
 a seal to substantially prevent the treatment material from flowing outside of the contact region and to substantially prevent material other than at least one of the treatment material and reactants resulting from treatment of the object from entering the opening, 
   wherein the treatment material comprises a liquid and the pressure of the treatment material, including a surface tension of the treatment material on the object to be wet-treated, is substantially equal to an atmospheric pressure, and   wherein the discharging pipe is provided at a right angle to the object and the introducing pipes are symmetrically provided about the discharging pipe.    
     
     
       50. The apparatus of claim 49, further comprising a displacement mechanism to displace the apparatus and the object relative to each other.  
     
     
       51. The apparatus of claim 49, further comprising a controller to maintain a constant distance between the opening and the surface.  
     
     
       52. The apparatus of claim 49, wherein the crossing section has a plurality of compartments.  
     
     
       53. The apparatus of claim 49, wherein the treatment material forms the seal, a pressure difference between a pressure of the treatment material and pressure external to the apparatus controlled by a controller.  
     
     
       54. The apparatus of claim 49, further comprising a lattice defining multiple apertures at the opening.  
     
     
       55. The apparatus of claim 49, further comprising an auxiliary pipe disposed between the discharging pipe and the surface and that communicates with the crossing section.  
     
     
       56. The apparatus of claim 49, further comprising an extension that extends inward from an edge of the crossing section such that the opening is smaller than an area defined by the edge of the crossing section.  
     
     
       57. The apparatus of claim 49, wherein the seal comprises one of cilia and a film.  
     
     
       58. The apparatus of claim 49, further comprising an auxiliary introducing pipe disposed between the discharging pipe and the introducing pipe and communicating with the discharging pipe such that new treatment material may be introduced into the discharging pipe.  
     
     
       59. The apparatus of claim 49, further comprising a parallel flow section in parallel with the surface, the parallel flow section formed in at least one of the introducing pipe, the discharging pipe, and between the introducing pipe and discharging pipe.  
     
     
       60. The apparatus of claim 49, further comprising at least two introducing pipes with the discharging pipe disposed between the introducing pipes.  
     
     
       61. The apparatus of claim 49, further comprising at least two discharging pipes with the introducing pipe disposed between the discharging pipes.  
     
     
       62. The apparatus of claim 49, wherein an area of the opening is variable.  
     
     
       63. The apparatus of claim 49, wherein a ceiling of the crossing section has a plurality of stepped portions, at least one of an ultrasonic element and radiation source is provided on the stepped portions such that the at least one of the ultrasonic element and radiation source is oriented non-parallel to the surface of the object.  
     
     
       64. An apparatus for treating a portion of a surface of an object, the apparatus comprising:
 an entry through which a treatment material enters the apparatus;   an exit through which the treatment material exits the apparatus; and   a treatment portion comprising a ceiling permitting contact between the treatment material and a portion of the surface of the object being treated, the ceiling providing a lateral distance between the entry and the exit, and   an ultrasonic mechanism to impart an ultrasonic wave to the wet treatment liquid, the ultrasonic mechanism operating at a frequency of at least 19 KHz,   wherein contact between the treatment material and the portion of the surface occurs in a state substantially excluding gas external to the apparatus, and   wherein the treatment material comprises a liquid and the pressure of the treatment material, including a surface tension of the treatment material on the object to be wet-treated, is substantially equal to an atmospheric pressure.    
     
     
       65. A wet treatment liquid feed apparatus for subjecting an object to a wet treatment therein, the wet treatment liquid feed apparatus comprising:
 a nozzle assembly including:
 an introducing pipe having an introducing port to introduce the wet treatment liquid at an end thereof; 
 a discharging pipe having a discharging port to discharge the wet treatment liquid to outside the discharging pipe after the object has been subjected to the wet treatment; 
 a crossing section formed by connecting another end of said introducing pipe and an end of said discharging pipe, respectively; and 
 an opening section provided at a bottom of said crossing section and open to the object to be subjected to the wet treatment; and 
 a pressure controller to control a difference between a pressure of the wet treatment liquid in contact with the object to be wet-treated and an atmospheric pressure to prevent the wet treatment liquid in contact with the object to be subjected to the wet treatment via said opening section from flowing to outside said discharging pipe, and 
   wherein a portion of a ceiling opposite to the treatment surface of the object to be wet-treated is formed into a waved shape having a plurality of steps, and a plurality of ultrasonic elements are provided at an angle to the treatment surface of the object to be wet-treated on the stepped portion.