Mechanism for fixing probe card

Abstract

In a mechanism for fixing a probe card, the probe card and a support frame are joined to each other about the axis of each of the probe card and the support frame by a plurality of first fastening members. Also, the outer circumferential edge portion of the support frame is fixed by a plurality of second fastening members to a holder fixed to a probe unit. The probe card is held by the mechanism such that the central region of the probe card is restricted by the first fastening members and the outer circumferential portion of the probe card is not restricted so as to be rendered free. It follows that the probe card is expanded toward the outer circumferential edge portion by thermal expansion under a high-temperature. However, the probe card is prevented from being deformed in the shape of a dome.

1. A fixing mechanism arranged within a probe unit for examining the electrical characteristics of a target object, the target object being maintained under a high-temperature environment within a probe chamber, comprising:
 a probe card provided with a plurality of probes which are to be brought into an electrical and mechanical contact with the target object, which is configured to examine the electrical characteristics of the target object, the probe card being exposed to a high-temperature atmosphere; 
 a support frame configured to support the probe card in the central portion thereof; 
 a plurality of first fastening members configured to fasten the probe card on the support frame to fix the probe card; 
 a holding frame configured to hold the probe card and the support frame in the outer peripheral portions thereof so as to permit the probe card to be thermally expanded toward the periphery thereof, the holding frame being fixed to the probe unit; and 
 a plurality of second fastening members configured to fasten the holding frame on the support frame to fix the holding frame. 
 
     
     
       2. A fixing mechanism according to  claim 1 , wherein the probe card is held between the holding frame and the support frame. 
     
     
       3. A fixing mechanism according to  claim 1 , wherein the outer circumferential edge portion of the probe card is positioned between the support frame and the holding frame, and a clearance is formed on the outside of the outer circumferential surface of the probe card. 
     
     
       4. A fixing mechanism according to  claim 1 , wherein each of the support frame and the holding frame is formed of a material having a low thermal expansion coefficient. 
     
     
       5. A fixing mechanism according to  claim 1 , wherein a heat-insulating material layer is formed on the lower surface of at least one of the support frame and the holding frame. 
     
     
       6. A fixing mechanism according to  claim 1 , further comprising a head plate having the holding frame fixed thereto. 
     
     
       7. A fixing mechanism according to  claim 1 , wherein the holding frame corresponds to the head plate. 
     
     
       8. A card holder for fixing a probe card on a probe unit that examines an electrical characteristic of a target object, the probe card including probes for electrically contacting the target object in the probe unit, the card holder comprising:
 an annular outer portion configured for attachment to the probe unit; and   an inner flange portion extending from the outer portion;   wherein:   the inner flange portion comprises an opening and an inner edge defining the opening in which the probe card can be located;   the inner flange portion comprises a plurality of cut portions, each cut portion extending from the inner edge toward the outer portion; and   the cut portions are arranged at regular intervals in a circumferential direction along the inner edge of the opening.   
     
     
       9. The card holder according to claim 8, wherein the inner flange portion comprises a plurality of slits, each of the slits being provided between adjacent cut portions and extending along the cut portions. 
     
     
       10. A fixing mechanism for fixing a probe card on a probe unit that examines an electrical characteristic of a target object, the probe card having probes for electrically contacting the target object in the probe unit, the fixing mechanism comprising:
 a fixing portion provided on the probe unit for fixing the probe card to the probe unit; and   a card holder for holding the probe card so that the probe card electrically contacts the target object, the card holder being configured to be interposed between the probe card and the probe unit and hold the probe card, the card holder comprising:
 an annular outer portion fixed to the fixing portion; and 
 an inner flange portion extending from the outer portion; 
 wherein: 
 the inner flange comprises an opening and an inner edge defining the opening in which the probe card can be located; 
 the inner flange portion comprises a plurality of cut portions, each cut portion extending from the inner edge toward the outer portion; and 
 the cut portions are arranged at regular intervals in a circumferential direction along the inner edge of the opening. 
   
     
     
       11. The fixing mechanism according to claim 10, wherein the inner flange portion comprises a plurality of slits, each of the slits being provided between adjacent cut portions and extending along the cut portions. 
     
     
       12. The fixing mechanism according to claim 10, wherein the fixing portion is coupled to the outer portion. 
     
     
       13. The fixing mechanism according to claim 10, wherein the fixing portion corresponds to a head plate of the probe unit.