Assignee
AKIYAMA YASUSHI
JP·1 granted patent·1 pending application·0 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0139US2010324330A1Process for Preventing Development Defect and Composition for Use in the SameAKIYAMA YASUSHI·Filed 2010·Application pending·0 cites
- 0236US8568955B2Composition for formation of top antireflective film, and pattern formation method using the compositionAKIYAMA YASUSHI·Filed 2008·Granted Oct 29, 2013·0 cites·8 claims
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