Assignee
DUSSARRAT CHRISTIAN
JP·19 granted patents·15 pending applications·1,060 citations·filing 2004–2015
Top patents by PatentIndex Score
34 records- 0198US8227032B2Method of forming silicon oxide containing filmsDUSSARRAT CHRISTIAN·Filed 2006·Granted Jul 24, 2012·472 cites·12 claims
- 0297US8668957B2Method of forming dielectric films, new precursors and their use in semiconductor manufacturingDUSSARRAT CHRISTIAN·Filed 2007·Granted Mar 11, 2014·535 cites·22 claims
- 0393US8153832B2Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereofDUSSARRAT CHRISTIAN·Filed 2006·Granted Apr 10, 2012·12 cites·5 claims
- 0492US8454928B2Tellurium precursors for GST depositionDUSSARRAT CHRISTIAN·Filed 2008·Granted Jun 4, 2013·14 cites·22 claims
- 0591US8617649B2Cyclopentadienyl transition metal precursors for deposition of transition metal-containing filmsDUSSARRAT CHRISTIAN·Filed 2012·Granted Dec 31, 2013·4 cites·16 claims
- 0691US8470402B2Method of depositing a metal-containing dielectric filmDUSSARRAT CHRISTIAN·Filed 2011·Granted Jun 25, 2013·10 cites·25 claims
- 0786US8329583B2Metal precursors for semiconductor applicationsDUSSARRAT CHRISTIAN·Filed 2011·Granted Dec 11, 2012·2 cites·22 claims
- 0882US8236979B2Methods for synthesis of heteroleptic cyclopentadienyl transition metal precursorsDUSSARRAT CHRISTIAN·Filed 2009·Granted Aug 7, 2012·3 cites·5 claims
- 0975US8298616B2Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing filmsDUSSARRAT CHRISTIAN·Filed 2009·Granted Oct 30, 2012·1 cites·19 claims
- 1072US9045509B2Hafnium- and zirconium-containing precursors and methods of using the sameDUSSARRAT CHRISTIAN·Filed 2010·Granted Jun 2, 2015·1 cites·13 claims
- 1170US8765220B2Methods of making and deposition methods using hafnium- or zirconium-containing compoundsDUSSARRAT CHRISTIAN·Filed 2010·Granted Jul 1, 2014·2 cites·20 claims
- 1268US8404306B2Method for the deposition of a ruthenium containing filmDUSSARRAT CHRISTIAN·Filed 2006·Granted Mar 26, 2013·2 cites·7 claims
- 1366US8932674B2Vapor deposition methods of SiCOH low-k filmsDUSSARRAT CHRISTIAN·Filed 2011·Granted Jan 13, 2015·2 cites·17 claims
- 1459US2010034719A1Novel lanthanide beta-diketonate precursors for lanthanide thin film depositionDUSSARRAT CHRISTIAN·Filed 2009·Application pending·0 cites
- 1554US8071163B2Deposition of Ta- or Nb-doped high-k filmsDUSSARRAT CHRISTIAN·Filed 2008·Granted Dec 6, 2011·0 cites·18 claims
- 1653US8613976B2Method of forming silicon oxide containing filmsDUSSARRAT CHRISTIAN·Filed 2012·Granted Dec 24, 2013·0 cites·7 claims
- 1752US8476465B2Deposition of Ta- or Nb-doped high-k filmsDUSSARRAT CHRISTIAN·Filed 2011·Granted Jul 2, 2013·0 cites·2 claims
- 1851US2007134433A1Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor depositionDUSSARRAT CHRISTIAN·Filed 2007·Application pending·0 cites
- 1950US2013089681A1Plasma-enhanced deposition of titanium-containing films for various applications using amidinate titanium precursorsDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2050US2010119406A1Allyl-containing precursors for the deposition of metal-containing filmsDUSSARRAT CHRISTIAN·Filed 2009·Application pending·0 cites
- 2150US2013089680A1Plasma-enhanced deposition of ruthenium-containing films for various applications using amidinate ruthenium precursorsDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2250US2010256405A1Synthesis of allyl-containing precursors for the deposition of metal-containing filmsDUSSARRAT CHRISTIAN·Filed 2009·Application pending·0 cites
- 2350US2013089679A1Plasma-enhanced deposition of manganese-containing films for various applications using amidinate manganese precursorsDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2450US2010104755A1Deposition method of ternary filmsDUSSARRAT CHRISTIAN·Filed 2005·Application pending·0 cites
- 2550US2013084407A1Plasma-enhanced deposition of copper-containing films for various applications using amidinate copper precursorsDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2650US2013089678A1Plasma-enhanced deposition of nickel-containing films for various applications using amidinate nickel precursorsDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2749US9121093B2Bis-ketoiminate copper precursors for deposition of copper-containing films and methods thereofDUSSARRAT CHRISTIAN·Filed 2010·Granted Sep 1, 2015·0 cites·10 claims
- 2849US2013202794A1Metal film depositionDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 2946US8076243B2Metal precursors for deposition of metal-containing filmsDUSSARRAT CHRISTIAN·Filed 2010·Granted Dec 13, 2011·0 cites·5 claims
- 3043US9103019B2Metal precursors containing beta-diketiminato ligandsDUSSARRAT CHRISTIAN·Filed 2009·Granted Aug 11, 2015·0 cites·8 claims
- 3139US2013109198A1High carbon content molecules for amorphous carbon depositionDUSSARRAT CHRISTIAN·Filed 2011·Application pending·0 cites
- 3239US2006198958A1Methods for producing silicon nitride films by vapor-phase growthDUSSARRAT CHRISTIAN·Filed 2004·Application pending·0 cites
- 3339US2017204126A1Molybdenum- and tungsten-containing precursors for thin film depositionDUSSARRAT CHRISTIAN·Filed 2015·Application pending·0 cites
- 3437US2012227762A1Plasma ashing compounds and methods of useDUSSARRAT CHRISTIAN·Filed 2010·Application pending·0 cites
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