Assignee
KOMICO LTD
KR9 patents
Top patents by PatentIndex Score
US7473661B2Jan 6, 2009
Method for preparing a sintered body of aluminum nitride
KOMICO LTD7 citations70
US11795547B2Oct 24, 2023
Method of aerosol deposition coating for plasma resistant coating
KOMICO LTD0 citations60
US7375045B2May 20, 2008
High dense sintered body of aluminum nitride, method for preparing the same and member for manufacturing semiconductor using the sintered body
KOMICO LTD3 citations59
US12018385B2Jun 25, 2024
Material for plasma spray comprising Y—O—F compound, method for producing the same, and spray coating prepared using the same
KOMICO LTD0 citations55
US11560319B1Jan 24, 2023
Manufacturing method for spherical YOF-based powder, and spherical YOF-based powder and YOF-based coating layer manufactured thereby
KOMICO LTD0 citations55
US11473181B2Oct 18, 2022
Yittrium granular powder for thermal spray and thermal spray coating produced using the same
KOMICO LTD0 citations53
US11827975B2Nov 28, 2023
Photoplasma etching apparatus having improved plasma-resistant and manufacturing method therefor using a thermal diffusion phenomenon of a rare-earth metal thin film
KOMICO LTD0 citations51
US12378654B2Aug 5, 2025
Method of forming plasma-resistant coating layer with low brightness using heat treatment process of rare-earth metal compound powder
KOMICO LTD0 citations44
US12265010B2Apr 1, 2025
Particle measuring device
KOMICO LTD0 citations43