Assignee
LILAS GMBH
DE3 patents
Top patents by PatentIndex Score
US9520524B2Dec 13, 2016
Method for producing a solar cell, in particular a silicon thin-film solar cell
LILAS GMBH0 citations48
US11796792B2Oct 24, 2023
Apparatus for deflecting a laser radiation or for deflecting light
LILAS GMBH0 citations46
US10921582B2Feb 16, 2021
Apparatus for deflecting and/or modulating laser radiation
LILAS GMBH0 citations46