Assignee
MSP CORP
US·45 granted patents·12 pending applications·1,418 citations·filing 1989–2017
Top patents by PatentIndex Score
57 records- 0196US6221136B1Compact electrostatic precipitator for droplet aerosol collectionMSP CORP·Filed 1998·Granted Apr 24, 2001·100 cites·22 claims
- 0294US6639671B1Wide-range particle counterMSP CORP·Filed 2002·Granted Oct 28, 2003·64 cites·37 claims
- 0394US6527821B2Automatic condensed oil removerMSP CORP·Filed 2002·Granted Mar 4, 2003·49 cites·3 claims
- 0493US6349668B1Method and apparatus for thin film deposition on large area substratesMSP CORP·Filed 1998·Granted Feb 26, 2002·118 cites·40 claims
- 0592US6607597B2Method and apparatus for deposition of particles on surfacesMSP CORP·Filed 2001·Granted Aug 19, 2003·54 cites·21 claims
- 0692US6409839B1Method and apparatus for vapor generation and film depositionMSP CORP·Filed 1999·Granted Jun 25, 2002·91 cites·10 claims
- 0792US5609798AHigh output PSL aerosol generatorMSP CORP·Filed 1995·Granted Mar 11, 1997·130 cites·12 claims
- 0891US8603247B2Apparatus for counting particles in a gasMSP CORP·Filed 2013·Granted Dec 10, 2013·8 cites·6 claims
- 0991US7363828B2Aerosol measurement by dilution and particle countingMSP CORP·Filed 2005·Granted Apr 29, 2008·17 cites·19 claims
- 1090US6902604B2Electrostatic precipitator with internal power supplyMSP CORP·Filed 2003·Granted Jun 7, 2005·32 cites·11 claims
- 1190US6829044B2Compact, high-efficiency condensation nucleus counterMSP CORP·Filed 2002·Granted Dec 7, 2004·38 cites·22 claims
- 1290US5940175AMethod and apparatus for surface inspection in a chamberMSP CORP·Filed 1996·Granted Aug 17, 1999·104 cites·13 claims
- 1389US6723568B1Method and apparatus for cascade impactor testing of inhalable drug therapies recovery for chemical analysisMSP CORP·Filed 2000·Granted Apr 20, 2004·29 cites·15 claims
- 1487US6453758B1Efficient high-productivity cascade impactorsMSP CORP·Filed 2000·Granted Sep 24, 2002·24 cites·25 claims
- 1587US6431014B1High accuracy aerosol impactor and monitorMSP CORP·Filed 1999·Granted Aug 13, 2002·81 cites·13 claims
- 1684US5160664AHigh output monodisperse aerosol generatorMSP CORP·Filed 1991·Granted Nov 3, 1992·60 cites·14 claims
- 1783US7882799B2Method and apparatus for generating charged particles for deposition on a surfaceMSP CORP·Filed 2005·Granted Feb 8, 2011·6 cites·9 claims
- 1883US5916640AMethod and apparatus for controlled particle deposition on surfacesMSP CORP·Filed 1996·Granted Jun 29, 1999·58 cites·17 claims
- 1982US9768005B1Electrospray ionizer for mass spectrometry of aerosol particlesMSP CORP·Filed 2016·Granted Sep 19, 2017·4 cites·17 claims
- 2081US5498271ADiesel particle virtual impactor samplerMSP CORP·Filed 1994·Granted Mar 12, 1996·57 cites·3 claims
- 2180US6364941B2Compact high efficiency electrostatic precipitator for droplet aerosol collectionMSP CORP·Filed 2001·Granted Apr 2, 2002·33 cites·8 claims
- 2280US5453107AAir and gas cooling and filtration apparatusMSP CORP·Filed 1994·Granted Sep 26, 1995·49 cites·12 claims
- 2379US7325441B2Personal mask test systemMSP CORP·Filed 2005·Granted Feb 5, 2008·9 cites·20 claims
- 2477US5534309AMethod and apparatus for depositing particles on surfacesMSP CORP·Filed 1994·Granted Jul 9, 1996·59 cites·10 claims
- 2576US9895707B2Method and apparatus for generating monodisperse aerosolsMSP CORP·Filed 2015·Granted Feb 20, 2018·3 cites·15 claims
- 2676US7830510B2Apparatus for high-accuracy fiber counting in airMSP CORP·Filed 2009·Granted Nov 9, 2010·6 cites·13 claims
- 2776US7082811B2Cascade impactor with individually driven impactor platesMSP CORP·Filed 2004·Granted Aug 1, 2006·12 cites·19 claims
- 2874US6746539B2Scanning deposition head for depositing particles on a waferMSP CORP·Filed 2001·Granted Jun 8, 2004·17 cites·11 claims
- 2972US5006227AVolumetric flow controller for aerosol classifierMSP CORP·Filed 1989·Granted Apr 9, 1991·31 cites·12 claims
- 3069US11085861B1Apparatus for real-time size-distributed measurement of aerosol mass concentrationMSP CORP·Filed 2015·Granted Aug 10, 2021·1 cites·5 claims
- 3168US6601777B2Suspended particle container for an atomizerMSP CORP·Filed 2001·Granted Aug 5, 2003·12 cites·9 claims
- 3267US7267711B2Electrostatic precipitator for diesel blow-byMSP CORP·Filed 2004·Granted Sep 11, 2007·12 cites·15 claims
- 3367US6805907B2Method and apparatus for vapor generation and film depositionMSP CORP·Filed 2002·Granted Oct 19, 2004·6 cites·9 claims
- 3467US6595368B2Pre-separator for inlets of cascade impactorsMSP CORP·Filed 2000·Granted Jul 22, 2003·7 cites·10 claims
- 3566US8945281B1Method and apparatus for vapor generation and wafer cleaningMSP CORP·Filed 2014·Granted Feb 3, 2015·1 cites·22 claims
- 3665US8529985B2Method for liquid precursor atomizationMSP CORP·Filed 2012·Granted Sep 10, 2013·1 cites·17 claims
- 3761US6543301B2Impactor nozzle plateMSP CORP·Filed 2000·Granted Apr 8, 2003·3 cites·8 claims
- 3860US6561045B2Sampler for eliminating particle-related artifacts for flue gas measurementMSP CORP·Filed 2001·Granted May 13, 2003·3 cites·18 claims
- 3959US6647758B2Method and apparatus for verifying integrity of cascade impactorsMSP CORP·Filed 2000·Granted Nov 18, 2003·2 cites·6 claims
- 4057US5343767ALow particle loss cascade impactorMSP CORP·Filed 1992·Granted Sep 6, 1994·22 cites·14 claims
- 4157US2010203244A1High accuracy vapor generation and delivery for thin film depositionMSP CORP·Filed 2010·Application pending·0 cites
- 4255US8986784B2Fine droplet atomization for liquid precursor vaporizationMSP CORP·Filed 2013·Granted Mar 24, 2015·0 cites·5 claims
- 4355US2009293807A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2009·Application pending·0 cites
- 4453US2004250634A1Method and apparatus for cascade impactor testing of inhalable drug therapies recovery for chemical analysisMSP CORP·Filed 2004·Application pending·0 cites
- 4552US10287679B2Apparatus and method for vapor generation and film depositionMSP CORP·Filed 2017·Granted May 14, 2019·0 cites·15 claims
- 4652US2014096715A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
- 4751US6520673B2Mixing devices for sample recovery from a USP induction port or a pre-separatorMSP CORP·Filed 2000·Granted Feb 18, 2003·5 cites·7 claims
- 4851US2013295776A1Method for vapor condensation and recoveryMSP CORP·Filed 2013·Application pending·0 cites
- 4950US9541488B2Particle sampling and measurement in the ambient airMSP CORP·Filed 2013·Granted Jan 10, 2017·0 cites·14 claims
- 5050US2013312674A1Integrated system for vapor generation and thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
Showing the top 50 of 57 patent records by PatentIndex Score.
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