Assignee
MSP CORP
US45 patents
Top patents by PatentIndex Score
US6431014B1Aug 13, 2002
High accuracy aerosol impactor and monitor
MSP CORP81 citations98
US6409839B1Jun 25, 2002
Method and apparatus for vapor generation and film deposition
MSP CORP91 citations97
US6349668B1Feb 26, 2002
Method and apparatus for thin film deposition on large area substrates
MSP CORP118 citations97
US6221136B1Apr 24, 2001
Compact electrostatic precipitator for droplet aerosol collection
MSP CORP100 citations97
US5940175AAug 17, 1999
Method and apparatus for surface inspection in a chamber
MSP CORP104 citations97
US6639671B1Oct 28, 2003
Wide-range particle counter
MSP CORP64 citations96
US6607597B2Aug 19, 2003
Method and apparatus for deposition of particles on surfaces
MSP CORP54 citations96
US6527821B2Mar 4, 2003
Automatic condensed oil remover
MSP CORP49 citations96
US5916640AJun 29, 1999
Method and apparatus for controlled particle deposition on surfaces
MSP CORP58 citations96
US5534309AJul 9, 1996
Method and apparatus for depositing particles on surfaces
MSP CORP59 citations96
US5160664ANov 3, 1992
High output monodisperse aerosol generator
MSP CORP60 citations96
US5498271AMar 12, 1996
Diesel particle virtual impactor sampler
MSP CORP57 citations94
US6829044B2Dec 7, 2004
Compact, high-efficiency condensation nucleus counter
MSP CORP38 citations93
US5609798AMar 11, 1997
High output PSL aerosol generator
MSP CORP130 citations93
US5453107ASep 26, 1995
Air and gas cooling and filtration apparatus
MSP CORP49 citations93
US6723568B1Apr 20, 2004
Method and apparatus for cascade impactor testing of inhalable drug therapies recovery for chemical analysis
MSP CORP29 citations92
US6453758B1Sep 24, 2002
Efficient high-productivity cascade impactors
MSP CORP24 citations92
US6364941B2Apr 2, 2002
Compact high efficiency electrostatic precipitator for droplet aerosol collection
MSP CORP33 citations92
US5343767ASep 6, 1994
Low particle loss cascade impactor
MSP CORP22 citations91
US5006227AApr 9, 1991
Volumetric flow controller for aerosol classifier
MSP CORP31 citations91
US6902604B2Jun 7, 2005
Electrostatic precipitator with internal power supply
MSP CORP32 citations90
US7363828B2Apr 29, 2008
Aerosol measurement by dilution and particle counting
MSP CORP17 citations84
US7325441B2Feb 5, 2008
Personal mask test system
MSP CORP9 citations84
US7267711B2Sep 11, 2007
Electrostatic precipitator for diesel blow-by
MSP CORP12 citations84
US7082811B2Aug 1, 2006
Cascade impactor with individually driven impactor plates
MSP CORP12 citations84
US6746539B2Jun 8, 2004
Scanning deposition head for depositing particles on a wafer
MSP CORP17 citations84
US8603247B2Dec 10, 2013
Apparatus for counting particles in a gas
MSP CORP8 citations82
US7882799B2Feb 8, 2011
Method and apparatus for generating charged particles for deposition on a surface
MSP CORP6 citations73
US6805907B2Oct 19, 2004
Method and apparatus for vapor generation and film deposition
MSP CORP6 citations73
US6601777B2Aug 5, 2003
Suspended particle container for an atomizer
MSP CORP12 citations73
US6595368B2Jul 22, 2003
Pre-separator for inlets of cascade impactors
MSP CORP7 citations73
US9895707B2Feb 20, 2018
Method and apparatus for generating monodisperse aerosols
MSP CORP3 citations68
US9768005B1Sep 19, 2017
Electrospray ionizer for mass spectrometry of aerosol particles
MSP CORP4 citations65
US8529985B2Sep 10, 2013
Method for liquid precursor atomization
MSP CORP1 citations63
US6647758B2Nov 18, 2003
Method and apparatus for verifying integrity of cascade impactors
MSP CORP2 citations62
US6561045B2May 13, 2003
Sampler for eliminating particle-related artifacts for flue gas measurement
MSP CORP3 citations62
US6543301B2Apr 8, 2003
Impactor nozzle plate
MSP CORP3 citations62
US6520673B2Feb 18, 2003
Mixing devices for sample recovery from a USP induction port or a pre-separator
MSP CORP5 citations62
US11085861B1Aug 10, 2021
Apparatus for real-time size-distributed measurement of aerosol mass concentration
MSP CORP1 citations58
US7830510B2Nov 9, 2010
Apparatus for high-accuracy fiber counting in air
MSP CORP6 citations58
US8986784B2Mar 24, 2015
Fine droplet atomization for liquid precursor vaporization
MSP CORP0 citations51
US8945281B1Feb 3, 2015
Method and apparatus for vapor generation and wafer cleaning
MSP CORP1 citations51
US10287679B2May 14, 2019
Apparatus and method for vapor generation and film deposition
MSP CORP0 citations41
US9797593B2Oct 24, 2017
Apparatus and method for vapor generation and film deposition
MSP CORP0 citations41
US9541488B2Jan 10, 2017
Particle sampling and measurement in the ambient air
MSP CORP0 citations39