Assignee
OKUMURA KATSUYA
JP·3 granted patents·7 pending applications·48 citations·filing 2004–2012
Top patents by PatentIndex Score
10 records- 0192US8416920B2Target for X-ray generation, X-ray generator, and method for producing target for X-ray generationOKUMURA KATSUYA·Filed 2010·Granted Apr 9, 2013·48 cites·15 claims
- 0251US2006009130A1Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceOKUMURA KATSUYA·Filed 2005·Application pending·0 cites
- 0347US8324726B2Semiconductor device, electrode member and electrode member fabrication methodOKUMURA KATSUYA·Filed 2006·Granted Dec 4, 2012·0 cites·17 claims
- 0447US2012244697A1Method for fabricating a semiconductor deviceOKUMURA KATSUYA·Filed 2012·Application pending·0 cites
- 0547US2011162802A1Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing methodOKUMURA KATSUYA·Filed 2011·Application pending·0 cites
- 0645US2006255182A1Pattern forming apparatus and method of manufacturing pattern forming apparatusOKUMURA KATSUYA·Filed 2006·Application pending·0 cites
- 0741US2009128171A1Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer ProgramOKUMURA KATSUYA·Filed 2006·Application pending·0 cites
- 0837US2006172665A1Polishing tool and polishing apparatusOKUMURA KATSUYA·Filed 2004·Application pending·0 cites
- 0937US2007258837A1Pump Unit for Supplying Chemical LiquidsOKUMURA KATSUYA·Filed 2005·Application pending·0 cites
- 1036US8531007B2Semiconductor device and the method for manufacturing the sameOKUMURA KATSUYA·Filed 2010·Granted Sep 10, 2013·0 cites·17 claims
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