Assignee
AXUS TECH LLC
US·9 granted patents·8 pending applications·1 citations·filing 2017–2025
Top patents by PatentIndex Score
17 records- 0180US11904431B2Method and apparatus for insitu adjustment of wafer slip detection during work piece polishingAXUS TECH LLC·Filed 2020·Granted Feb 20, 2024·1 cites·13 claims
- 0276US2026070183A1Thermally conductive chemical mechanical polishing (cmp) padAXUS TECH LLC·Filed 2025·Application pending·0 cites
- 0375US2025329556A1Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 0474US2025065473A1Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 0573US2022088744A1Cmp machine with improved throughput and process flexibilityAXUS TECH LLC·Filed 2021·Application pending·0 cites
- 0672US12377520B2Method and apparatus for insitu adjustment of wafer slip detection during work piece polishingAXUS TECH LLC·Filed 2024·Granted Aug 5, 2025·0 cites·16 claims
- 0769US12145236B2Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 0864US11376705B2Chemical mechanical planarization carrier systemAXUS TECH LLC·Filed 2019·Granted Jul 5, 2022·0 cites·8 claims
- 0962US12217979B2Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2020·Granted Feb 4, 2025·0 cites·24 claims
- 1062US2025187141A1Apparatus and method for in-situ chemical separation and recirculation in a chemical mechanical processing systemAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 1161US2018311784A1Cmp machine with improved throughput and process flexibilityAXUS TECH LLC·Filed 2018·Application pending·0 cites
- 1257US11685012B2Planarized membrane and methods for substrate processing systemsAXUS TECH LLC·Filed 2018·Granted Jun 27, 2023·0 cites·26 claims
- 1357US10315286B2Chemical mechanical planarization carrier systemAXUS TECH LLC·Filed 2017·Granted Jun 11, 2019·0 cites·18 claims
- 1453US12023778B2Substrate carrier head and processing systemAXUS TECH LLC·Filed 2020·Granted Jul 2, 2024·0 cites·20 claims
- 1550US2022395956A1Method and apparatus for in-situ monitoring of chemical mechanical planarization (cmp) processesAXUS TECH LLC·Filed 2022·Application pending·0 cites
- 1650US2026014667A1Carrier for polishing workpieces with flats or voidsAXUS TECH LLC·Filed 2023·Application pending·0 cites
- 1745US12198935B2Atmospheric plasma in wafer processing system optimizationAXUS TECH LLC·Filed 2018·Granted Jan 14, 2025·0 cites·16 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →