Assignee
KCTECH CO LTD
KR·30 granted patents·49 pending applications·11 citations·filing 2015–2025
Top patents by PatentIndex Score
79 records- 0190US11332641B2Polishing slurry composition enabling implementation of multi-selectivityKCTECH CO LTD·Filed 2020·Granted May 17, 2022·4 cites·14 claims
- 0283US11384255B2Polishing slurry composition for STI processKCTECH CO LTD·Filed 2018·Granted Jul 12, 2022·4 cites·14 claims
- 0381US2026082856A1Substrate treatment lineKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 0477US2026070186A1Membrane and substrate polishing device including the sameKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 0574US2025312888A1Substrate processing systemKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 0669US2024286243A1Substrate polishing apparatusKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 0767US2025145858A1Slurry composition for polishing metal filmKCTECH CO LTD·Filed 2024·Application pending·0 cites
- 0866US2025312881A1Chemical mechanical polishing device and methodKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 0964US2025145859A1Slurry composition for chemical mechanical polishingKCTECH CO LTD·Filed 2024·Application pending·0 cites
- 1062US10494547B2Additive composition and positive polishing slurry composition including the sameKCTECH CO LTD·Filed 2016·Granted Dec 3, 2019·1 cites·9 claims
- 1161US2026076146A1Apparatus for processing supercritical substrateKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 1261US2023061965A1Substrate treatment lineKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 1360US11597055B2Carrier head of polishing apparatus and membrane used thereinKCTECH CO LTD·Filed 2019·Granted Mar 7, 2023·0 cites·7 claims
- 1460US2025361432A1Slurry Composition for Chemical Mechanical PolishingKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 1560US2022111485A1Substrate processing systemKCTECH CO LTD·Filed 2021·Application pending·0 cites
- 1659US2025026960A1Polishing slurry compositionKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 1759US2024375242A1Method for discriminating wafer region and wafer region discrimination apparatus for performing the sameKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 1859US2022305611A1Substrate polishing system and substrate polishing methodKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 1957US12037516B2Polishing slurry composition and method for producing sameKCTECH CO LTD·Filed 2019·Granted Jul 16, 2024·0 cites·22 claims
- 2057US11592342B2Temperature detection deviceKCTECH CO LTD·Filed 2020·Granted Feb 28, 2023·0 cites·8 claims
- 2157US2023339070A1High-precision substrate polishing systemKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 2257US2025387876A1Conditioning apparatus for conditioning polishing padKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 2356US12428584B2Cerium oxide abrasive particles and polishing slurry compositionKCTECH CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 2455US12448542B2Slurry composition for polishing organic filmKCTECH CO LTD·Filed 2020·Granted Oct 21, 2025·0 cites·16 claims
- 2555US11612981B2Substrate processing apparatusKCTECH CO LTD·Filed 2019·Granted Mar 28, 2023·1 cites·12 claims
- 2654US11883857B2Cleaning solution detection deviceKCTECH CO LTD·Filed 2021·Granted Jan 30, 2024·0 cites·16 claims
- 2754US11279851B2Polishing slurry compositionKCTECH CO LTD·Filed 2019·Granted Mar 22, 2022·1 cites·9 claims
- 2854US2023373042A1Substrate chuck used in scrubbing processKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 2953US12503622B2Cerium-based particle and polishing slurry composition including the sameKCTECH CO LTD·Filed 2022·Granted Dec 23, 2025·0 cites·12 claims
- 3053US12394627B2Substrate polishing systemKCTECH CO LTD·Filed 2022·Granted Aug 19, 2025·0 cites·17 claims
- 3153US12187919B2Polishing slurry compositionKCTECH CO LTD·Filed 2021·Granted Jan 7, 2025·0 cites·11 claims
- 3253US2025326961A1Slurry Composition for Low-K Film PolishingKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 3353US2023402297A1Substrate processing apparatus and system including the sameKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 3453US2025002755A1Slurry composition for metal polishingKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 3552US12031062B2Polishing slurry composition for sti processKCTECH CO LTD·Filed 2019·Granted Jul 9, 2024·0 cites·11 claims
- 3652US2025304822A1Slurry composition for chemical mechanical polishingKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 3751US11732217B2Cleaning solution composition and cleaning method using the sameKCTECH CO LTD·Filed 2021·Granted Aug 22, 2023·0 cites·15 claims
- 3851US11407081B2Substrate processing apparatusKCTECH CO LTD·Filed 2019·Granted Aug 9, 2022·0 cites·21 claims
- 3951US2024286176A1Substrate cleaning apparatusKCTECH CO LTD·Filed 2023·Application pending·0 cites
- 4050US11701693B2Substrate processing device comprising door unit having inclined surfaceKCTECH CO LTD·Filed 2020·Granted Jul 18, 2023·0 cites·14 claims
- 4149US12528974B2Polishing slurry compositionKCTECH CO LTD·Filed 2022·Granted Jan 20, 2026·0 cites·11 claims
- 4249US12451370B2Substrate processing system with vertical arrangement structureKCTECH CO LTD·Filed 2021·Granted Oct 21, 2025·0 cites·9 claims
- 4349US12186900B2Substrate cleaning line and substrate cleaning system comprising the sameKCTECH CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·13 claims
- 4449US2023136640A1Polishing slurry compositionKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 4549US2023193071A1Surface treatment agent for organic-inorganic hybrid compositionKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 4649US2025290013A1Cleaning solution composition used after metal film polishingKCTECH CO LTD·Filed 2025·Application pending·0 cites
- 4748US12305079B2CMP slurry composition for polishing polycrystalline silicon and polishing method using sameKCTECH CO LTD·Filed 2019·Granted May 20, 2025·0 cites·12 claims
- 4848US12091636B2Composition for dissolving abrasive particles and cleaning method using the sameKCTECH CO LTD·Filed 2021·Granted Sep 17, 2024·0 cites·11 claims
- 4948US2022274228A1Substrate polishing systemKCTECH CO LTD·Filed 2022·Application pending·0 cites
- 5048US2022274264A1Substrate transferring systemKCTECH CO LTD·Filed 2022·Application pending·0 cites
Showing the top 50 of 79 patent records by PatentIndex Score.
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