Assignee
KUMADA TERUHIKO
JP·2 granted patents·2 pending applications·5 citations·filing 2004–2013
Top patents by PatentIndex Score
4 records- 0170US8846148B2Composition for chemical vapor deposition film-formation and method for production of low dielectric constant filmKUMADA TERUHIKO·Filed 2006·Granted Sep 30, 2014·4 cites·4 claims
- 0260US8404314B2Plasma CVD apparatus, method for forming thin film and semiconductor deviceKUMADA TERUHIKO·Filed 2007·Granted Mar 26, 2013·1 cites·3 claims
- 0348US2013160711A1Plasma cvd apparatus, method for forming thin film and semiconductor deviceKUMADA TERUHIKO·Filed 2013·Application pending·0 cites
- 0439US2005282015A1Composition for low dielectric material, low dielectric material and method for production thereofKUMADA TERUHIKO·Filed 2004·Application pending·0 cites
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