Assignee
RANISH JOSEPH M
US·11 granted patents·2 pending applications·80 citations·filing 2007–2013
Top patents by PatentIndex Score
13 records- 0192US8294068B2Rapid thermal processing lamphead with improved coolingRANISH JOSEPH M·Filed 2008·Granted Oct 23, 2012·17 cites·21 claims
- 0289USRE44712ELamp for rapid thermal processing chamberRANISH JOSEPH M·Filed 2011·Granted Jan 21, 2014·8 cites·30 claims
- 0388US8772055B1Multizone control of lamps in a conical lamphead using pyrometersRANISH JOSEPH M·Filed 2013·Granted Jul 8, 2014·6 cites·5 claims
- 0486US8283607B2Apparatus including heating source reflective filter for pyrometryRANISH JOSEPH M·Filed 2008·Granted Oct 9, 2012·11 cites·14 claims
- 0583US8314368B2Silver reflectors for semiconductor processing chambersRANISH JOSEPH M·Filed 2008·Granted Nov 20, 2012·27 cites·18 claims
- 0678US8979087B2Substrate supporting edge ring with coating for improved soak performanceRANISH JOSEPH M·Filed 2012·Granted Mar 17, 2015·3 cites·26 claims
- 0777US9870919B2Process chamber having separate process gas and purge gas regionsRANISH JOSEPH M·Filed 2013·Granted Jan 16, 2018·3 cites·9 claims
- 0873US9905444B2Optics for controlling light transmitted through a conical quartz domeRANISH JOSEPH M·Filed 2013·Granted Feb 27, 2018·2 cites·14 claims
- 0968US8452166B2Apparatus and method for measuring radiation energy during thermal processingRANISH JOSEPH M·Filed 2009·Granted May 28, 2013·2 cites·18 claims
- 1062US9536728B2Lamp for rapid thermal processing chamberRANISH JOSEPH M·Filed 2007·Granted Jan 3, 2017·1 cites·19 claims
- 1145US9175908B2Lamphead atmosphereRANISH JOSEPH M·Filed 2012·Granted Nov 3, 2015·0 cites·8 claims
- 1244US2008090309A1Controlled annealing methodRANISH JOSEPH M·Filed 2007·Application pending·0 cites
- 1342US2013284097A1Gas distribution module for insertion in lateral flow chambersRANISH JOSEPH M·Filed 2013·Application pending·0 cites
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