Assignee
VAARTSTRA BRIAN A
US·7 granted patents·3 pending applications·6 citations·filing 2006–2011
Top patents by PatentIndex Score
10 records- 0178US8394725B2Systems and methods for forming metal oxide layersVAARTSTRA BRIAN A·Filed 2011·Granted Mar 12, 2013·2 cites·30 claims
- 0278US8114219B2Systems and methods for forming metal oxide layersVAARTSTRA BRIAN A·Filed 2010·Granted Feb 14, 2012·2 cites·26 claims
- 0377US8653573B2Dielectric layers and memory cells including metal-doped aluminaVAARTSTRA BRIAN A·Filed 2011·Granted Feb 18, 2014·2 cites·19 claims
- 0460US8461682B2Ruthenium silicide diffusion barrier layers and methods of forming sameVAARTSTRA BRIAN A·Filed 2009·Granted Jun 11, 2013·0 cites·23 claims
- 0556US8282985B2Flow-fill spacer structures for flat panel display deviceVAARTSTRA BRIAN A·Filed 2010·Granted Oct 9, 2012·0 cites·11 claims
- 0655US2012067283A1Systems and Methods for Forming Metal Oxide LayersVAARTSTRA BRIAN A·Filed 2011·Application pending·0 cites
- 0754US2008274615A1Atomic Layer Deposition Methods, Methods of Forming Dielectric Materials, Methods of Forming Capacitors, And Methods of Forming DRAM Unit CellsVAARTSTRA BRIAN A·Filed 2007·Application pending·0 cites
- 0854US2007045856A1Mixed metal nitride and boride barrier layersVAARTSTRA BRIAN A·Filed 2006·Application pending·0 cites
- 0952US9184061B2Systems and methods for forming zirconium and/or hafnium-containing layersVAARTSTRA BRIAN A·Filed 2006·Granted Nov 10, 2015·0 cites·24 claims
- 1046US8617312B2Systems and methods for forming layers that contain niobium and/or tantalumVAARTSTRA BRIAN A·Filed 2006·Granted Dec 31, 2013·0 cites·11 claims
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