Assignee
WONIK IPS CO LTD
KR·35 granted patents·31 pending applications·9 citations·filing 2010–2025
Top patents by PatentIndex Score
66 records- 0186US9464353B2Substrate processing apparatusWONIK IPS CO LTD·Filed 2013·Granted Oct 11, 2016·5 cites·12 claims
- 0279US12563801B2Processing method for substrateWONIK IPS CO LTD·Filed 2023·Granted Feb 24, 2026·0 cites·20 claims
- 0379US12563802B2Processing method for substrateWONIK IPS CO LTD·Filed 2023·Granted Feb 24, 2026·0 cites·20 claims
- 0479US11784029B2Method and apparatus for atomic layer etchingWONIK IPS CO LTD·Filed 2021·Granted Oct 10, 2023·1 cites·16 claims
- 0572US11482452B2Method of forming a contact plug in a semiconductor integrated circuit deviceWONIK IPS CO LTD·Filed 2020·Granted Oct 25, 2022·1 cites·11 claims
- 0671US2026049768A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2025·Application pending·0 cites
- 0767US11823907B2Processing method for substrateWONIK IPS CO LTD·Filed 2020·Granted Nov 21, 2023·0 cites·20 claims
- 0865US2026052932A1Heat exchange module and substrate processing apparatus including the sameWONIK IPS CO LTD·Filed 2025·Application pending·0 cites
- 0965US2026052929A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2025·Application pending·0 cites
- 1065US2024309506A1Substrate processing apparatus and substrate processing methodWONIK IPS CO LTD·Filed 2023·Application pending·0 cites
- 1164US2013149808A1Method of fabricating a solar cellWONIK IPS CO LTD·Filed 2013·Application pending·0 cites
- 1263US8367549B2Method of manufacturing semiconductor deviceWONIK IPS CO LTD·Filed 2010·Granted Feb 5, 2013·1 cites·9 claims
- 1361US2025233017A1Gap-filling method for a semiconductor device and method of manufacturing a semiconductor device using the sameWONIK IPS CO LTD·Filed 2024·Application pending·0 cites
- 1460US12442077B2Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Granted Oct 14, 2025·0 cites·11 claims
- 1560US10811294B2Substrate transfer apparatus and control method thereofWONIK IPS CO LTD·Filed 2017·Granted Oct 20, 2020·1 cites·5 claims
- 1659US2024162046A1Substrate processing methodWONIK IPS CO LTD·Filed 2023·Application pending·0 cites
- 1758US2024203691A1Apparatus for processing substrates and method of processing substrates using the sameWONIK IPS CO LTD·Filed 2023·Application pending·0 cites
- 1857US2021317574A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2020·Application pending·0 cites
- 1957US2023070804A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 2056US2023416923A1Substrate processing apparatus and substrate processing system having the sameWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 2155US12538732B2Substrate processing apparatus and substrate processing methodWONIK IPS CO LTD·Filed 2022·Granted Jan 27, 2026·0 cites·7 claims
- 2255US2021317575A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2020·Application pending·0 cites
- 2353US12581910B2Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Granted Mar 17, 2026·0 cites·18 claims
- 2453US11967503B2Method of depositing thin film and method of manufacturing semiconductor device using the sameWONIK IPS CO LTD·Filed 2021·Granted Apr 23, 2024·0 cites·14 claims
- 2552US2025364288A1Apparatus for processing substrateWONIK IPS CO LTD·Filed 2025·Application pending·0 cites
- 2651US12465940B2Substrate processing apparatusWONIK IPS CO LTD·Filed 2023·Granted Nov 11, 2025·0 cites·10 claims
- 2751US2024014011A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 2850US12377483B2Method of assembling substrate supporting apparatusWONIK IPS CO LTD·Filed 2023·Granted Aug 5, 2025·0 cites·9 claims
- 2950US2023416917A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 3050US2023072156A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 3150US2024290586A1Method for forming thin film and apparatus for processing substrate thereforWONIK IPS CO LTD·Filed 2023·Application pending·0 cites
- 3250US2023073660A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 3349US11651960B2Method for forming amorphous silicon thin film, method for manufacturing semiconductor device including same, and semiconductor manufactured therebyWONIK IPS CO LTD·Filed 2021·Granted May 16, 2023·0 cites·8 claims
- 3449US10529565B2Method of forming amorphous silicon layerWONIK IPS CO LTD·Filed 2018·Granted Jan 7, 2020·0 cites·9 claims
- 3549US2023081962A1Method for forming graphene barrier layer for semiconductor device and contact structure formed by the sameWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 3649US2023084826A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2022·Application pending·0 cites
- 3748US10699900B2Method for forming thin filmWONIK IPS CO LTD·Filed 2019·Granted Jun 30, 2020·0 cites·20 claims
- 3847US12027371B2Substrate processing methodWONIK IPS CO LTD·Filed 2021·Granted Jul 2, 2024·0 cites·15 claims
- 3947US11965244B2Substrate processing method, substrate processing apparatus using the same, and semiconductor device manufacturing methodWONIK IPS CO LTD·Filed 2021·Granted Apr 23, 2024·0 cites·20 claims
- 4046US12243720B2Gas supply block and substrate-processing apparatus including the sameWONIK IPS CO LTD·Filed 2021·Granted Mar 4, 2025·0 cites·27 claims
- 4146US10886141B2Method of depositing tungstenWONIK IPS CO LTD·Filed 2019·Granted Jan 5, 2021·0 cites·6 claims
- 4246US10662528B2Substrate processing apparatus and substrate processing method using the sameWONIK IPS CO LTD·Filed 2017·Granted May 26, 2020·0 cites·11 claims
- 4346US2024052488A1Feeding block and substrate processing apparatus including the sameWONIK IPS CO LTD·Filed 2023·Application pending·0 cites
- 4446US2021005501A1Substrate processing apparatusWONIK IPS CO LTD·Filed 2020·Application pending·0 cites
- 4545US12371783B2Internal chamber processing method and substrate processing methodWONIK IPS CO LTD·Filed 2021·Granted Jul 29, 2025·0 cites·19 claims
- 4645US11450531B2Atomic layer etching methodWONIK IPS CO LTD·Filed 2020·Granted Sep 20, 2022·0 cites·17 claims
- 4745US9269568B2Method of manufacturing semiconductor device using the sameWONIK IPS CO LTD·Filed 2014·Granted Feb 23, 2016·0 cites·4 claims
- 4844US12024777B2Method of processing substrateWONIK IPS CO LTD·Filed 2021·Granted Jul 2, 2024·0 cites·16 claims
- 4944US11875998B2Substrate processing methodWONIK IPS CO LTD·Filed 2020·Granted Jan 16, 2024·0 cites·5 claims
- 5044US11292023B2Substrate processing apparatusWONIK IPS CO LTD·Filed 2020·Granted Apr 5, 2022·0 cites·10 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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