Assignee
XU CHONGYING
US·4 granted patents·5 pending applications·10 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0186US8206784B2Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric filmsXU CHONGYING·Filed 2009·Granted Jun 26, 2012·8 cites·23 claims
- 0275US8784936B2Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric filmsXU CHONGYING·Filed 2012·Granted Jul 22, 2014·2 cites·11 claims
- 0358US2006235182A1Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin filmsXU CHONGYING·Filed 2006·Application pending·0 cites
- 0454US8524931B2Precursor compositions for ALD/CVD of group II ruthenate thin filmsXU CHONGYING·Filed 2007·Granted Sep 3, 2013·0 cites·4 claims
- 0554US2008064136A1Supercritical fluid-assisted deposition of materials on semiconductor substratesXU CHONGYING·Filed 2007·Application pending·0 cites
- 0648US2006178006A1Supercritical fluid-assisted deposition of materials on semiconductor substratesXU CHONGYING·Filed 2006·Application pending·0 cites
- 0746US2006065294A1Compositions and methods for drying patterned wafers during manufacture of integrated circuitry productsXU CHONGYING·Filed 2005·Application pending·0 cites
- 0844US8663735B2In situ generation of RuO4 for ALD of Ru and Ru related materialsXU CHONGYING·Filed 2010·Granted Mar 4, 2014·0 cites·9 claims
- 0938US2012196449A1Zirconium, hafnium and titanium precursors for atomic layer deposition of corresponding metal-containing filmsXU CHONGYING·Filed 2012·Application pending·0 cites
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