Inventor · disambiguated record
Ivan L. Berry, Iii
Also filed as: BERRY III IVAN · BERRY III IVAN L · BERRY III IVAN LOUIS · BERRY IVAN
58 granted patents·22 pending applications·4,688 citations·filing 1983–2024
99Inventor score
Top patents by PatentIndex Score
80 records- 0199US9431268B2Isotropic atomic layer etch for silicon and germanium oxidesLAM RES CORP·Filed 2015·Granted Aug 30, 2016·135 cites·20 claims
- 0298US9406535B2Ion injector and lens system for ion beam millingLAM RES CORP·Filed 2014·Granted Aug 2, 2016·33 cites·17 claims
- 0398US6756085B2Ultraviolet curing processes for advanced low-k materialsAXCELIS TECH INC·Filed 2003·Granted Jun 29, 2004·685 cites·58 claims
- 0498US6576300B1High modulus, low dielectric constant coatingsDOW CORNING·Filed 2000·Granted Jun 10, 2003·588 cites·19 claims
- 0598US6558755B2Plasma curing process for porous silica thin filmDOW CORNING·Filed 2001·Granted May 6, 2003·563 cites·13 claims
- 0697US9779955B2Ion beam etching utilizing cryogenic wafer temperaturesLAM RES CORP·Filed 2016·Granted Oct 3, 2017·21 cites·18 claims
- 0797US9425041B2Isotropic atomic layer etch for silicon oxides using no activationLAM RES CORP·Filed 2015·Granted Aug 23, 2016·143 cites·18 claims
- 0897US8071451B2Method of doping semiconductorsBERRY IVAN L·Filed 2009·Granted Dec 6, 2011·543 cites·13 claims
- 0996US10580628B2Differentially pumped reactive gas injectorLAM RES CORP·Filed 2017·Granted Mar 3, 2020·8 cites·19 claims
- 1096US9536748B2Use of ion beam etching to generate gate-all-around structureLAM RES CORP·Filed 2014·Granted Jan 3, 2017·22 cites·29 claims
- 1195US11062920B2Ion injector and lens system for ion beam millingLAM RES CORP·Filed 2018·Granted Jul 13, 2021·8 cites·14 claims
- 1295US9916993B2Ion injector and lens system for ion beam millingLAM RES CORP·Filed 2016·Granted Mar 13, 2018·9 cites·13 claims
- 1395US6913796B2Plasma curing process for porous low-k materialsDOW CORNING·Filed 2001·Granted Jul 5, 2005·527 cites·34 claims
- 1495US6759098B2Plasma curing of MSQ-based porous low-k film materialsAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·580 cites·19 claims
- 1594US7629272B2Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectricsAXCELIS TECH INC·Filed 2005·Granted Dec 8, 2009·26 cites·16 claims
- 1694US6281135B1Oxygen free plasma stripping processAXCELIS TECH INC·Filed 1999·Granted Aug 28, 2001·309 cites·23 claims
- 1793US9837254B2Differentially pumped reactive gas injectorLAM RES CORP·Filed 2014·Granted Dec 5, 2017·12 cites·25 claims
- 1893US9812349B2Control of the incidence angle of an ion beam on a substrateLAM RES CORP·Filed 2015·Granted Nov 7, 2017·8 cites·6 claims
- 1993US6664737B1Dielectric barrier discharge apparatus and process for treating a substrateAXCELIS TECH INC·Filed 2002·Granted Dec 16, 2003·51 cites·21 claims
- 2092US6548416B2Plasma ashing processAXCELIS TECHNOLGOIES INC·Filed 2001·Granted Apr 15, 2003·93 cites·4 claims
- 2191US6638875B2Oxygen free plasma stripping processAXCELIS TECH INC·Filed 2001·Granted Oct 28, 2003·69 cites·6 claims
- 2289US10825652B2Ion beam etch without need for wafer tilt or rotationLAM RES CORP·Filed 2015·Granted Nov 3, 2020·5 cites·10 claims
- 2389US6630406B2Plasma ashing processAXCELIS TECHNOLOGIES·Filed 2001·Granted Oct 7, 2003·50 cites·45 claims
- 2486US10998167B2Ion beam etch without need for wafer tilt or rotationLAM RES CORP·Filed 2019·Granted May 4, 2021·3 cites·18 claims
- 2586US9129778B2Fluid distribution members and/or assembliesHUSEINOVIC ARMIN·Filed 2011·Granted Sep 8, 2015·9 cites·22 claims
- 2686US7709814B2Apparatus and process for treating dielectric materialsAXCELIS TECH INC·Filed 2005·Granted May 4, 2010·12 cites·47 claims
- 2784US6734120B1Method of photoresist ash residue removalAXCELIS TECH INC·Filed 2000·Granted May 11, 2004·34 cites·6 claims
- 2882US9911620B2Method for achieving ultra-high selectivity while etching silicon nitrideLAM RES CORP·Filed 2015·Granted Mar 6, 2018·3 cites·20 claims
- 2981US12302760B2Ion beam etching with sidewall cleaningLAM RES CORP·Filed 2024·Granted May 13, 2025·0 cites·16 claims
- 3080US10679868B2Isotropic atomic layer etch for silicon oxides using no activationLAM RES CORP·Filed 2016·Granted Jun 9, 2020·3 cites·17 claims
- 3180US10153282B1Ultra-high vacuum transport and storageLAM RES CORP·Filed 2017·Granted Dec 11, 2018·3 cites·17 claims
- 3279US11520953B2Predicting etch characteristics in thermal etching and atomic layer etchingLAM RES CORP·Filed 2018·Granted Dec 6, 2022·3 cites·27 claims
- 3379US11289306B2Ion beam etching utilizing cryogenic wafer temperaturesLAM RES CORP·Filed 2017·Granted Mar 29, 2022·2 cites·10 claims
- 3479US10483085B2Use of ion beam etching to generate gate-all-around structureLAM RES CORP·Filed 2016·Granted Nov 19, 2019·2 cites·8 claims
- 3579US6834656B2Plasma process for removing polymer and residues from substratesAXCELIS TECHNOLOGY INC·Filed 2001·Granted Dec 28, 2004·30 cites·21 claims
- 3677US11637022B2Electron excitation atomic layer etchLAM RES CORP·Filed 2019·Granted Apr 25, 2023·1 cites·23 claims
- 3777US11195730B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2019·Granted Dec 7, 2021·2 cites·10 claims
- 3877US6406836B1Method of stripping photoresist using re-coating materialAXCELIS TECH INC·Filed 2000·Granted Jun 18, 2002·21 cites·4 claims
- 3976US7473909B2Use of ion induced luminescence (IIL) as feedback control for ion implantationAXCELIS TECH INC·Filed 2006·Granted Jan 6, 2009·3 cites·30 claims
- 4074US7704872B2Ultraviolet assisted pore sealing of porous low k dielectric filmsAXCELIS TECH INC·Filed 2007·Granted Apr 27, 2010·1 cites·9 claims
- 4170US2023298904A1Electron excitation atomic layer etchLAM RES CORP·Filed 2023·Application pending·0 cites
- 4268US7678682B2Ultraviolet assisted pore sealing of porous low k dielectric filmsAXCELIS TECH INC·Filed 2004·Granted Mar 16, 2010·7 cites·20 claims
- 4367US6759133B2High modulus, low dielectric constant coatingsDOW CORNING·Filed 2003·Granted Jul 6, 2004·8 cites·36 claims
- 4466US12029133B2Ion beam etching with sidewall cleaningLAM RES CORP·Filed 2020·Granted Jul 2, 2024·0 cites·17 claims
- 4566US9514954B2Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic filmsLAM RES CORP·Filed 2014·Granted Dec 6, 2016·2 cites·20 claims
- 4665US6605484B2Process for optically erasing charge buildup during fabrication of an integrated circuitAXCELIS TECH INC·Filed 2001·Granted Aug 12, 2003·9 cites·21 claims
- 4763US6503366B2Chemical plasma cathodeAXCELIS TECH INC·Filed 2000·Granted Jan 7, 2003·13 cites·10 claims
- 4861US10490426B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Nov 26, 2019·1 cites·29 claims
- 4961US9543150B2Systems and methods for forming ultra-shallow junctionsLAM RES CORP·Filed 2015·Granted Jan 10, 2017·1 cites·27 claims
- 5060US7888661B2Methods for in situ surface treatment in an ion implantation systemAXCELIS TECH INC·Filed 2008·Granted Feb 15, 2011·0 cites·14 claims
Showing the top 50 of 80 patent records by PatentIndex Score.
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