P

Inventor

HASEGAWA KOJI

JP259 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

35 patents
US7537880B2May 26, 2009

Polymer, resist composition, and patterning process

SHINETSU CHEMICAL CO258 citations99
US6448420B1Sep 10, 2002

Acid-decomposable ester compound suitable for use in resist material

SHINETSU CHEMICAL CO160 citations99
US6312867B1Nov 6, 2001

Ester compounds, polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO209 citations99
US6280898B1Aug 28, 2001

Lactone-containing compounds, polymers, resist compositions, and patterning method

SHINETSU CHEMICAL CO229 citations99
US7670750B2Mar 2, 2010

Polymer, resist protective coating material, and patterning process

SHINETSU CHEMICAL CO65 citations98
US7084303B2Aug 1, 2006

Tertiary amine compounds having an ester structure and processes for preparing same

SHINETSU CHEMICAL CO79 citations98
US6147249ANov 14, 2000

Ester compounds, polymers, resist composition and patterning process

SHINETSU CHEMICAL CO81 citations96
US7981589B2Jul 19, 2011

Fluorinated monomer, fluorinated polymer, resist composition and patterning process

SHINETSU CHEMICAL CO22 citations93
US7642034B2Jan 5, 2010

Polymer, resist protective coating material, and patterning process

SHINETSU CHEMICAL CO22 citations93
US7622242B2Nov 24, 2009

Resist composition and patterning process

SHINETSU CHEMICAL CO25 citations93
US7527912B2May 5, 2009

Photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO38 citations93
US6746818B2Jun 8, 2004

(Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process

SHINETSU CHEMICAL CO48 citations93
US6703183B2Mar 9, 2004

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO23 citations93
US6673515B2Jan 6, 2004

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO20 citations93
US6673518B2Jan 6, 2004

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO20 citations93
US6492090B2Dec 10, 2002

Polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO25 citations93
US6444396B1Sep 3, 2002

Ester compounds, polymers, resist composition and patterning process

SHINETSU CHEMICAL CO24 citations93
US6284429B1Sep 4, 2001

Ester compounds, polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO50 citations93
US10915021B2Feb 9, 2021

Monomer, polymer, resist composition, and patterning process

SHINETSU CHEMICAL CO8 citations84
US10303056B2May 28, 2019

Resist composition and patterning process

SHINETSU CHEMICAL CO11 citations84
US9335632B2May 10, 2016

Positive resist composition and patterning process

SHINETSU CHEMICAL CO9 citations84
US9023587B2May 5, 2015

Negative resist composition and patterning process

SHINETSU CHEMICAL CO14 citations84
US7875417B2Jan 25, 2011

Silicone-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method

SHINETSU CHEMICAL CO12 citations84
US7871752B2Jan 18, 2011

Lactone-containing compound, polymer, resist composition, and patterning process

SHINETSU CHEMICAL CO11 citations84
USRE41580EAug 24, 2010

Lactone-containing compounds, polymers, resist compositions, and patterning method

SHINETSU CHEMICAL CO8 citations84
US7741015B2Jun 22, 2010

Patterning process and resist composition

SHINETSU CHEMICAL CO14 citations84
US7718342B2May 18, 2010

Polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO9 citations84
US7678530B2Mar 16, 2010

Lactone-containing compound, polymer, resist composition, and patterning process

SHINETSU CHEMICAL CO9 citations84
US7531289B2May 12, 2009

Fluorinated monomer having cyclic structure, manufacturing method, polymer, photoresist composition and patterning process

SHINETSU CHEMICAL CO16 citations84
US6794111B2Sep 21, 2004

Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation

SHINETSU CHEMICAL CO16 citations84
US6566038B2May 20, 2003

Polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO13 citations84
US6524765B1Feb 25, 2003

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO14 citations84
US6509135B2Jan 21, 2003

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO16 citations84
US6492089B2Dec 10, 2002

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO14 citations84
US6413695B1Jul 2, 2002

Resist compositions and patterning process

SHINETSU CHEMICAL CO18 citations84

SONY CORP

3 patents

HATAKEYAMA JUN

2 patents

OGIHARA TSUTOMU

2 patents

NISSHIN OIL MILLS LTD

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

SHOWA DENKO KK

1 patent

DAINIPPON SCREEN MFG

1 patent

HARADA YUJI

1 patent

OHSAWA YOUICHI

1 patent

EUDYNA DEVICES INC

1 patent

POWREX KK

1 patent

Showing the top 50 of 259 patents by PatentIndex Score.