Inventor
HASEGAWA KOJI
JP259 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
35 patentsUS7537880B2May 26, 2009
Polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO258 citations99
US6448420B1Sep 10, 2002
Acid-decomposable ester compound suitable for use in resist material
SHINETSU CHEMICAL CO160 citations99
US6312867B1Nov 6, 2001
Ester compounds, polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO209 citations99
US6280898B1Aug 28, 2001
Lactone-containing compounds, polymers, resist compositions, and patterning method
SHINETSU CHEMICAL CO229 citations99
US7670750B2Mar 2, 2010
Polymer, resist protective coating material, and patterning process
SHINETSU CHEMICAL CO65 citations98
US7084303B2Aug 1, 2006
Tertiary amine compounds having an ester structure and processes for preparing same
SHINETSU CHEMICAL CO79 citations98
US6147249ANov 14, 2000
Ester compounds, polymers, resist composition and patterning process
SHINETSU CHEMICAL CO81 citations96
US7981589B2Jul 19, 2011
Fluorinated monomer, fluorinated polymer, resist composition and patterning process
SHINETSU CHEMICAL CO22 citations93
US7642034B2Jan 5, 2010
Polymer, resist protective coating material, and patterning process
SHINETSU CHEMICAL CO22 citations93
US7622242B2Nov 24, 2009
Resist composition and patterning process
SHINETSU CHEMICAL CO25 citations93
US7527912B2May 5, 2009
Photoacid generators, resist compositions, and patterning process
SHINETSU CHEMICAL CO38 citations93
US6746818B2Jun 8, 2004
(Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process
SHINETSU CHEMICAL CO48 citations93
US6703183B2Mar 9, 2004
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO23 citations93
US6673515B2Jan 6, 2004
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO20 citations93
US6673518B2Jan 6, 2004
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO20 citations93
US6492090B2Dec 10, 2002
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO25 citations93
US6444396B1Sep 3, 2002
Ester compounds, polymers, resist composition and patterning process
SHINETSU CHEMICAL CO24 citations93
US6284429B1Sep 4, 2001
Ester compounds, polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO50 citations93
US10915021B2Feb 9, 2021
Monomer, polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO8 citations84
US10303056B2May 28, 2019
Resist composition and patterning process
SHINETSU CHEMICAL CO11 citations84
US9335632B2May 10, 2016
Positive resist composition and patterning process
SHINETSU CHEMICAL CO9 citations84
US9023587B2May 5, 2015
Negative resist composition and patterning process
SHINETSU CHEMICAL CO14 citations84
US7875417B2Jan 25, 2011
Silicone-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method
SHINETSU CHEMICAL CO12 citations84
US7871752B2Jan 18, 2011
Lactone-containing compound, polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO11 citations84
USRE41580EAug 24, 2010
Lactone-containing compounds, polymers, resist compositions, and patterning method
SHINETSU CHEMICAL CO8 citations84
US7741015B2Jun 22, 2010
Patterning process and resist composition
SHINETSU CHEMICAL CO14 citations84
US7718342B2May 18, 2010
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO9 citations84
US7678530B2Mar 16, 2010
Lactone-containing compound, polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO9 citations84
US7531289B2May 12, 2009
Fluorinated monomer having cyclic structure, manufacturing method, polymer, photoresist composition and patterning process
SHINETSU CHEMICAL CO16 citations84
US6794111B2Sep 21, 2004
Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation
SHINETSU CHEMICAL CO16 citations84
US6566038B2May 20, 2003
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO13 citations84
US6524765B1Feb 25, 2003
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO14 citations84
US6509135B2Jan 21, 2003
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO16 citations84
US6492089B2Dec 10, 2002
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO14 citations84
US6413695B1Jul 2, 2002
Resist compositions and patterning process
SHINETSU CHEMICAL CO18 citations84
SONY CORP
3 patentsHATAKEYAMA JUN
2 patentsOGIHARA TSUTOMU
2 patentsUS8652750B2Feb 18, 2014
Silicon-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method
OGIHARA TSUTOMU9 citations84
US8501386B2Aug 6, 2013
Silicon-containing film-forming composition, silicon-containing film-formed substrate, and patterning process
OGIHARA TSUTOMU14 citations84
NISSHIN OIL MILLS LTD
1 patentMATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 patentSHOWA DENKO KK
1 patentDAINIPPON SCREEN MFG
1 patentHARADA YUJI
1 patentOHSAWA YOUICHI
1 patentEUDYNA DEVICES INC
1 patentPOWREX KK
1 patentShowing the top 50 of 259 patents by PatentIndex Score.