Inventor · disambiguated record
Dave Trussell
Also filed as: TRUSSELL DAVE
6 granted patents·212 citations·filing 2002–2010
86Inventor score
Top patents by PatentIndex Score
6 records- 0192US6744212B2Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditionsLAM RES CORP·Filed 2002·Granted Jun 1, 2004·94 cites·15 claims
- 0291US8674255B1Apparatus and method for controlling etch uniformityLENZ ERIC·Filed 2005·Granted Mar 18, 2014·23 cites·18 claims
- 0389US7683289B2Apparatus and method for controlling plasma density profileLAM RES CORP·Filed 2005·Granted Mar 23, 2010·31 cites·12 claims
- 0487US8299390B2Apparatus and method for controlling plasma density profileDHINDSA RAJINDER·Filed 2010·Granted Oct 30, 2012·13 cites·13 claims
- 0584US7405521B2Multiple frequency plasma processor method and apparatusLAM RES CORP·Filed 2003·Granted Jul 29, 2008·35 cites·45 claims
- 0680US7276135B2Vacuum plasma processor including control in response to DC bias voltageLAM RES CORP·Filed 2004·Granted Oct 2, 2007·16 cites·63 claims
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